Dr. Douglas R. Sparks Profile

Dr. Douglas R. Sparks

at Integrated Sensing Systems Inc

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Publications (2)

Proceedings Article | 23 December 2003 Paper

Reliable vacuum packaging using NanoGetters and glass frit bonding

Douglas Sparks, Sonbol Massoud-Ansari, Nader Najafi

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530414

KEYWORDS: Resonators, Semiconducting wafers, Packaging, Wafer bonding, Glasses, Silicon, Microelectromechanical systems, Sensors, Particles, Metals

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Proceedings Article | 5 September 1997 Paper

Automotive applications for micromachining

Douglas Sparks, Shih-Chia Chang

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284483

KEYWORDS: Micromachining, Silicon, Microelectromechanical systems, Sensors, Plasma etching, Wafer bonding, Integrated circuit packaging, Integrated circuit design, Integrated circuits, Packaging

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