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Dvori Stoler
Marketing Manager at KLA Corp
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Publications (2)
Proceedings Article | 25 October 2007 Paper
Optimizing defect inspection strategy through the use of design-aware database control layers
Dvori Stoler, Wayne Ruch, Weimin Ma, Swapnajit Chakravarty, Steven Liu, Ray Morgan, John Valadez, Bill Moore, John Burns
Proceedings Volume 6730, 67303L (2007) https://doi.org/10.1117/12.747302
KEYWORDS: Inspection, Photomasks, Databases, Manufacturing, Defect inspection, Semiconducting wafers, Mask making, Computed tomography, Optical proximity correction, Control systems
Proceedings Article | 27 March 2006 Paper
Advanced DFM applications using design-based metrology on CD SEM
G. Lorusso, L. Capodieci, D. Stoler, B. Schulz, S. Roling, J. Schramm, C. Tabery, K. Shah, B. Singh, G. Abbott, A. Roberts, A. Azordegan, L. Heinrichs, Z. Kaliblotzky, E. Castel
Proceedings Volume 6152, 61520B (2006) https://doi.org/10.1117/12.674776
KEYWORDS: Semiconducting wafers, Metrology, Optical proximity correction, Pattern recognition, Design for manufacturing, Scanning electron microscopy, Calibration, Computer aided design, Resolution enhancement technologies, Algorithm development
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