Dr. E. Timothy Goldburt Profile

Dr. E. Timothy Goldburt

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Publications (27)

Proceedings Article | 23 May 2015 Paper

Mobile, portable lightweight wireless video recording solutions for homeland security, defense, and law enforcement applications

Matt Sandy, Tim Goldburt, Edward Carapezza

Proceedings Volume 9456, 94560A (2015) https://doi.org/10.1117/12.2193820

KEYWORDS: Video, Cameras, Video surveillance, Homeland security, Defense and security, Information security, Network security, Visualization, Imaging systems, Sensors

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Proceedings Article | 16 April 2008 Paper

Zero false alarm seismic detection and identification systems

Alex Pakhomov, Tim Goldburt

Proceedings Volume 6943, 694317 (2008) https://doi.org/10.1117/12.793347

KEYWORDS: Sensors, Signal detection, Target detection, System identification, Detection and tracking algorithms, Environmental sensing, Seismic sensors, Signal processing, Amplifiers, Roads

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Proceedings Article | 4 May 2007 Paper

New seismic unattended small size module for footstep and light and heavy vehicles detection and identification

Alex Pakhomov, Tim Goldburt

Proceedings Volume 6562, 656216 (2007) https://doi.org/10.1117/12.721554

KEYWORDS: Sensors, Signal detection, Detection and tracking algorithms, Target detection, Electronic filtering, Roads, Plano, Signal processing, Connectors, Seismic sensors

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Proceedings Article | 5 October 2006 Paper

Field testing of new unattended small size seismic module for various target detection

Alex Pakhomov, Tim Goldburt

Proceedings Volume 6394, 63940D (2006) https://doi.org/10.1117/12.714301

KEYWORDS: Target detection, Roads, Sensors, Signal detection, Seismic sensors, Environmental sensing, Sensing systems, Detection and tracking algorithms, Manufacturing, Signal processing

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Proceedings Article | 10 May 2006 Paper

Seismic systems for unconventional target detection and identification

Alex Pakhomov, Tim Goldburt

Proceedings Volume 6201, 62011I (2006) https://doi.org/10.1117/12.668930

KEYWORDS: Target detection, Seismic sensors, Sensors, Homeland security, Defense and security, Visible radiation, Signal processing, Signal detection, Defense technologies, Sensing systems

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Proceedings Article | 2 May 2006 Paper

New seismic unattended small size module for footstep detection

Alex Pakhomov, Tim Goldburt

Proceedings Volume 6231, 623108 (2006) https://doi.org/10.1117/12.668932

KEYWORDS: Amplifiers, Sensors, Target detection, Signal processing, Signal detection, Data processing, Detection and tracking algorithms, Wireless communications, Homeland security, Seismic sensors

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Proceedings Article | 24 March 2006 Paper

Defining the role of SEM metrology for advanced process control

A. Nikitin, A. Sicignano, D. Yeremin, M. Sandy, T. Goldburt

Proceedings Volume 6152, 61523I (2006) https://doi.org/10.1117/12.656701

KEYWORDS: Scanning electron microscopy, Video, Metrology, Electron beams, Process control, Monte Carlo methods, Mathematical modeling, Telecommunications, Silicon, Reliability

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Proceedings Article | 27 October 2005 Paper

New sensitive seismic cable with imbedded geophones

Alex Pakhomov, Dan Pisano, Tim Goldburt

Proceedings Volume 5986, 59860R (2005) https://doi.org/10.1117/12.632905

KEYWORDS: Sensors, Signal detection, Seismic sensors, Homeland security, Amplifiers, Electronic circuits, Interference (communication), Information security, Sensing systems, Signal processing

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Proceedings Article | 27 May 2005 Paper

High performance seismic sensor requirements for military and security applications

A. Pakhomov, D. Pisano, A. Sicignano, T. Goldburt

Proceedings Volume 5796, (2005) https://doi.org/10.1117/12.604358

KEYWORDS: Sensors, Seismic sensors, Defense technologies, Target detection, Signal detection, Defense and security, Homeland security, Manufacturing, Signal processing, Sensing systems

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Proceedings Article | 20 May 2005 Paper

Testing of new seismic sensors for footstep detection and other security applications

A. Pakhomov, D. Pisano, A. Sicignano, T. Goldburt

Proceedings Volume 5778, (2005) https://doi.org/10.1117/12.604005

KEYWORDS: Sensors, Seismic sensors, Signal detection, Amplifiers, Manufacturing, Electronic circuits, Homeland security, Environmental sensing, Target detection, Sensing systems

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Proceedings Article | 10 May 2005 Paper

Critical issues in quantifying line edge roughness

A. Nikitin, A. Sicignano, D. Yeremin, M. Sandy, T. Goldburt

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599935

KEYWORDS: Line edge roughness, Scanning electron microscopy, Line width roughness, Photoresist materials, Transistors, Edge roughness, Edge detection, Error analysis, Magnetism, Metrology

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The problem of quantifying LER in the semiconductor industry has become critical with sub-100nm node manufacturing. However, routine methods for LER measurement to meet the needs of industry have not been reported. Even the definition for LER has not been defined unambiguously. Also, the length of the photoresist structure, on which LER is measured, has not bee standardized. Meanwhile, demands for precision in LER calculations have been put forward without accounting for the statistical nature of this parameter. In addition, the algorithms used for feature edge localization when performing LER measurements frequently have free parameters which makes LER estimation ambiguous and does not allow LER comparisons of the same feature. In particular, without taking into account the influence of signal noise in the SEM video, the LER measurements obtained will have contributions from both the measured feature and measuring tool (SEM). The manner in which this measurement is done results in LER values that exceed the true LER. Moreover, when measured objects have spect ratios exceeding three, it is not clear where along the cross-section height of the object-bottom, top, or some intermediate position-correspond to the measured values. The above issues make the interpretation of obtained results very difficult, and significantly reduces the reliability and value of LER measurement results present in the referenced literature. Nanometrology has developed a new concept for LER measurements that is free of many of the disadvantages mentioned above. It is based on the definition of LER as "a standard deviation of the factual edge position on SEM scan lines from an approximated straight line". Nanometrology's use of a patented algorithm for edge localization of 3D objects results in the measurement of the bottom CD of photoresist structures. Our algorithms do not have free parameters. These algorithms have been incorporated into a CD measurement software package called CD-LER.

Proceedings Article | 30 November 2004 Paper

Lab testing of new seismic sensor for defense and security applications

Alex Pakhomov, Albert Sicignano, Timothy Goldburt

Proceedings Volume 5611, (2004) https://doi.org/10.1117/12.581376

KEYWORDS: Sensors, Seismic sensors, Manufacturing, Defense and security, Acoustics, Target detection, Sensing systems, Reconnaissance systems, Sensor performance, Signal detection

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Proceedings Article | 15 September 2004 Paper

New seismic sensors for footstep detection and other military applications

Alex Pakhomov, Tim Goldburt

Proceedings Volume 5403, (2004) https://doi.org/10.1117/12.545293

KEYWORDS: Sensors, Electronic circuits, Seismic sensors, Signal detection, Oscillators, Electrodes, Microelectromechanical systems, Defense technologies, Electromagnetic interference, Nanocomposites

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Proceedings Article | 15 September 2004 Paper

Current seismic sensor issues for defense and security applications

Alex Pakhomov, Al Sicignano, Matt Sandy, Tim Goldburt

Proceedings Volume 5403, (2004) https://doi.org/10.1117/12.545296

KEYWORDS: Sensors, Seismic sensors, Microelectromechanical systems, Signal detection, Target detection, Electromagnetism, Defense and security, Homeland security, Interference (communication), Defense technologies

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Proceedings Article | 1 September 2004 Paper

Seismic signal and noise assessment for footstep detection range estimation in different environments

Alex Pakhomov, Tim Goldburt

Proceedings Volume 5417, (2004) https://doi.org/10.1117/12.545292

KEYWORDS: Signal detection, Interference (communication), Environmental sensing, Homeland security, Sensors, Electronic filtering, Defense and security, Seismic sensors, Signal to noise ratio, Sensing systems

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Proceedings Article | 24 May 2004 Paper

Nanocal calibration and pitch recertification of a Hitachi microscale standard

Dmitry Yeremin, Arkady Nikitin, Al Sicignano, Matt Sandy, Tim Goldburt, Bryan Tracy

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536095

KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Statistical analysis, Standards development, Precision calibration, Software development, Error analysis, Roads, Material characterization

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Proceedings Article | 24 May 2004 Paper

A novel and robust method for the accurate magnification characterization and calibration of out-of-fab SEM cluster tools

Al Sicignano, Arkady Nikitin, Dmitry Yeremin, Tim Goldburt, Bryan Tracy

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536047

KEYWORDS: Calibration, Scanning electron microscopy, Metrology, Critical dimension metrology, Precision calibration, System integration, Logic, Roads, Material characterization, Data analysis

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Proceedings Article | 22 September 2003 Paper

Seismic footstep signal characterization

Alex Pakhomov, Albert Sicignano, Matthew Sandy, E. Tim Goldburt

Proceedings Volume 5071, (2003) https://doi.org/10.1117/12.487751

KEYWORDS: Interference (communication), Sensors, Signal detection, Homeland security, Signal to noise ratio, Target detection, Electronic filtering, Seismic sensors, Filtering (signal processing), Signal analyzers

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Proceedings Article | 18 September 2003 Paper

Single- and three-axis geophone: footstep detection with bearing estimation, localization, and tracking

Alex Pakhomov, Albert Sicignano, Matthew Sandy, E. Tim Goldburt

Proceedings Volume 5090, (2003) https://doi.org/10.1117/12.487755

KEYWORDS: Error analysis, Roads, Signal detection, Homeland security, Sensing systems, Defense and security, Sensors, Cameras, Wave propagation, Seismic sensors

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Proceedings Article | 18 September 2003 Paper

A novel method for footstep detection with extremely low false alarm rate

Alex Pakhomov, Albert Sicignano, Matthew Sandy, E. Tim Goldburt

Proceedings Volume 5090, (2003) https://doi.org/10.1117/12.487753

KEYWORDS: Signal processing, Signal detection, Homeland security, Sensors, Seismic sensors, Software development, Computing systems, Sensing systems, Signal analyzers, Shape analysis

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Proceedings Article | 2 June 2003 Paper

Quantifying drift in SEM

Albert Sicignano, Dmitriy Yeremin, Matthew Sandy, E. Goldburt

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482833

KEYWORDS: Scanning electron microscopy, Metrology, Digital imaging, Chlorine, Image acquisition, Software development, Image analysis, Electromagnetism, Distortion, Image processing

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Proceedings Article | 2 June 2003 Paper

Designing a reference for CD-SEM magnification calibration

Albert Sicignano, Arkady Nikitin, Dmitriy Yeremin, Matthew Sandy, E. Tim Goldburt

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485018

KEYWORDS: Calibration, Scanning electron microscopy, Semiconducting wafers, Very large scale integration, Silicon, Contamination, Precision measurement, Gallium arsenide, Precision calibration, Edge detection

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Proceedings Article | 2 June 2003 Paper

Accuracy in CD-SEM metrology

Arkady Nikitin, Albert Sicignano, Dmitriy Yeremin, Matthew Sandy, E. Tim Goldburt

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485017

KEYWORDS: Algorithm development, Photoresist materials, Scanning electron microscopy, Metrology, Etching, Smoothing, Video, Image analysis, Silicon, Critical dimension metrology

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Proceedings Article | 24 July 2002 Paper

Scan linearity: a hidden factor in SEM magnification calibration

Albert Sicignano, Arkady Nikitin, Dmitriy Yeremin, Matthew Sandy, E. Goldburt

Proceedings Volume 4608, (2002) https://doi.org/10.1117/12.437972

KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Distortion, Precision measurement, Data corrections, Roads, Electron microscopes, Critical dimension metrology, Signal to noise ratio

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Proceedings Article | 16 July 2002 Paper

Matching and monitoring a CD-SEM tool cluster

Albert Sicignano, Arkady Nikitin, Dmitriy Yeremin, Matthew Sandy, E. Goldburt

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473446

KEYWORDS: Calibration, Metrology, Semiconducting wafers, Scanning electron microscopy, Precision calibration, Signal to noise ratio, Critical dimension metrology, Nanolithography, Silicon, Precision measurement

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Proceedings Article | 16 July 2002 Paper

Factors influencing CD-SEM metrology

Albert Sicignano, Arkady Nikitin, Dmitriy Yeremin, Matthew Sandy, E. Goldburt

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473447

KEYWORDS: Signal to noise ratio, Metrology, Calibration, Video, Convolution, Scanning electron microscopy, Semiconducting wafers, Digital imaging, Precision calibration, Signal processing

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Proceedings Article | 12 April 1999 Paper

Highly efficient phosphors and phospher screens for FED displays

E. Goldburt, V. Bolchouchine, B. Levonovitch, N. Sochtine

Proceedings Volume 3636, (1999) https://doi.org/10.1117/12.344635

KEYWORDS: Field emission displays, Plasmons, Flat panel displays, Electron beams, Luminescence, Ions, Spherical lenses, LED displays, Light emitting diodes, RGB color model

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Showing 5 of 27 publications

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