Dr. Egbert Buhr Profile

Dr. Egbert Buhr

at Physikalisch Technische Bundesanstalt

SPIE Involvement:

Author

Publications (19)

Proceedings Article | 2 November 2015 Paper

Photomask linewidth comparison by PTB and NIST

D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, G. Dai, R. Dixson, W. Häßler-Grohne, K. Hahm, M. Wurm

Proceedings Volume 9636, 96360S (2015) https://doi.org/10.1117/12.2199453

KEYWORDS: Photomasks, Metrology, Critical dimension metrology, Microscopes, Manufacturing, Standards development, Data modeling, Dimensional metrology, Scanning electron microscopy, Line width roughness, Opacity, Calibration, Atomic force microscopy

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Proceedings Article | 13 May 2013 Paper

The road towards accurate optical width measurements at the industrial level

Bernd Bodermann, Rainer Köning, Detlef Bergmann, Egbert Buhr, Wolfgang Hässler-Grohne, Jens Flügge, Harald Bosse

Proceedings Volume 8788, 87881S (2013) https://doi.org/10.1117/12.2021888

KEYWORDS: Calibration, Optical testing, Microscopes, Imaging systems, Edge roughness, Metrology, Objectives, Photomasks, Geometrical optics, Diffraction

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Proceedings Article | 23 September 2009 Paper

Results of an international photomask linewidth comparison of NIST and PTB

B. Bodermann, D. Bergmann, E. Buhr, W. Hässler-Grohne, H. Bosse, J. Potzick, R. Dixson, R. Quintanilha, M. Stocker, A. Vladar, N. Orji

Proceedings Volume 7488, 74881H (2009) https://doi.org/10.1117/12.831373

KEYWORDS: Photomasks, Scanning electron microscopy, Standards development, Metrology, Ultraviolet radiation, Microscopes, Atomic force microscopy, Calibration, Critical dimension metrology, Microscopy

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Proceedings Article | 17 October 2008 Paper

International photomask linewidth comparison by NIST and PTB

J. Potzick, R. Dixson, R. Quintanilha, M. Stocker, A. Vladar, E. Buhr, W. Häßler-Grohne, B. Bodermann, C. G. Frase, H. Bosse

Proceedings Volume 7122, 71222P (2008) https://doi.org/10.1117/12.801435

KEYWORDS: Photomasks, Metrology, Scanning electron microscopy, Calibration, Microscopes, Chromium, Ultraviolet radiation, Standards development, Critical dimension metrology, Interferometers

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Proceedings Article | 3 October 2008 Paper

Optical metrology of micro- and nanostructures at PTB: status and future developments

Bernd Bodermann, Egbert Buhr, Gerd Ehret, Frank Scholze, Matthias Wurm

Proceedings Volume 7155, 71550V (2008) https://doi.org/10.1117/12.814531

KEYWORDS: Diffraction, Microscopes, Metrology, Photomasks, Sensors, Microscopy, Extreme ultraviolet, Deep ultraviolet, Polarization, Scatterometry

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Proceedings Article | 25 March 2008 Paper

Picometer-scale accuracy in pitch metrology by optical diffraction and atomic force microscopy

Donald Chernoff, Egbert Buhr, David Burkhead, Alexander Diener

Proceedings Volume 6922, 69223J (2008) https://doi.org/10.1117/12.768429

KEYWORDS: Calibration, Atomic force microscopy, Diffraction, Diffraction gratings, Metrology, Microscopy, Beam splitters, Error analysis, Ultraviolet radiation, Microscopes

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Proceedings Article | 5 April 2007 Paper

A new SEM CD operator verified against Monte Carlo simulations

C. Frase, D. Gnieser, K. Dirscherl, E. Buhr, H. Bosse

Proceedings Volume 6518, 65184P (2007) https://doi.org/10.1117/12.712503

KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Critical dimension metrology, Computer simulations, Image acquisition, Scattering, Optical simulations, Electron beams, Convolution, Metrology

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Proceedings Article | 5 April 2007 Paper

Aspects and new developments on edge angle and edge profile metrology at PTB

Bernd Bodermann, Egbert Buhr, Alexander Diener, Kai Dirscherl, Gerd Ehret, Carl Georg Frase, Matthias Wurm

Proceedings Volume 6518, 65181X (2007) https://doi.org/10.1117/12.712137

KEYWORDS: Scanning electron microscopy, Metrology, Scatterometry, Atomic force microscopy, Photomasks, Sensors, Critical dimension metrology, Scatter measurement, Silicon, Polarization

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Proceedings Article | 20 October 2005 Paper

Development of a nanoscale linewidth-standard for high-resolution optical microscopy

Uwe Huebner, W. Morgenroth, R. Boucher, W. Mirandé, E. Buhr, Th. Fries, Nadine Schwarz, G. Kunath-Fandrei, R. Hild

Proceedings Volume 5965, 59651W (2005) https://doi.org/10.1117/12.625194

KEYWORDS: Quartz, Silicon, Ultraviolet radiation, Amorphous silicon, Calibration, Optical microscopy, Microscopy, Microscopes, Reflectivity, Atomic force microscopy

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Proceedings Article | 29 April 2005 Paper

An artifact-free structure-saving noise reduction using the correlation between two images for threshold determination in the wavelet domain

Oleg Tischenko, Christoph Hoeschen, Egbert Buhr

Proceedings Volume 5747, (2005) https://doi.org/10.1117/12.595863

KEYWORDS: Wavelets, Matrices, Image processing, Denoising, X-rays, Wavelet transforms, X-ray imaging, Lung, Quantum electronics, Signal attenuation

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Proceedings Article | 6 May 2004 Paper

Measurement of the detective quantum efficiency (DQE) of digital x-ray imaging devices according to the standard IEC 62220-1

Hartmut Illers, Egbert Buhr, Detlef Bergmann, Christoph Hoeschen

Proceedings Volume 5368, (2004) https://doi.org/10.1117/12.535999

KEYWORDS: Sensors, Modulation transfer functions, Chromium, X-ray detectors, X-rays, Data modeling, Imaging devices, Signal to noise ratio, Quantum efficiency, Data conversion

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Proceedings Article | 6 May 2004 Paper

Measurement of correlated noise in images of computed radiography systems and its influence on the detective quantum efficiency

Hartmut Illers, Dirk Vandenbroucke, Egbert Buhr

Proceedings Volume 5368, (2004) https://doi.org/10.1117/12.535807

KEYWORDS: Chromium, Sensors, Image segmentation, Spatial frequencies, X-rays, Luminescence, Radiography, Image analysis, Quantum efficiency, Computing systems

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Proceedings Article | 5 June 2003 Paper

Simple method for modulation transfer function determination of digital imaging detectors from edge images

Egbert Buhr, Susanne Guenther-Kohfahl, Ulrich Neitzel

Proceedings Volume 5030, (2003) https://doi.org/10.1117/12.479990

KEYWORDS: Modulation transfer functions, Sensors, Image sensors, Digital imaging, Signal detection, Fourier transforms, Imaging systems, Quantum efficiency, Spatial frequencies, Error analysis

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Proceedings Article | 5 June 2003 Paper

Measurement of the noise components in the medical x-ray intensity pattern due to overlaying nonrecognizable structures

Oleg Tischenko, Christoph Hoeschen, Olaf Effenberger, Steffen Reissberg, Egbert Buhr, Wilfried Doehring

Proceedings Volume 5030, (2003) https://doi.org/10.1117/12.480007

KEYWORDS: Lung, X-rays, Wavelets, Sensors, Radiography, X-ray imaging, X-ray detectors, Interference (communication), Signal detection, Medical imaging

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Proceedings Article | 25 April 2000 Paper

Determination of the x-ray intensity pattern in mammography with very high-spatial resolution

Christoph Hoeschen, Andreas Fessel, Egbert Buhr, Wilfried Doehring

Proceedings Volume 3977, (2000) https://doi.org/10.1117/12.384496

KEYWORDS: X-rays, X-ray imaging, Mammography, Scanners, Breast, Digital mammography, Sensors, Spatial frequencies, Digital x-ray imaging, Imaging systems

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Proceedings Article | 6 September 1999 Paper

High-definition illuminated table for optical testing

Michael Schulz, Egbert Buhr, Kai Marholdt, Winfried Willemer, Detlef Bergmann

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360185

KEYWORDS: Lamps, Cameras, Glasses, Modulation transfer functions, Tungsten, Monte Carlo methods, Optical testing, Camera shutters, Photography, Digital photography

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Proceedings Article | 28 May 1999 Paper

High-spatial-resolution measurement of x-ray intensity pattern in a radiograph of the thorax

Christoph Hoeschen, Egbert Buhr, Wilfried Doehring

Proceedings Volume 3659, (1999) https://doi.org/10.1117/12.349520

KEYWORDS: X-rays, Scanners, Spatial frequencies, X-ray imaging, Lung, Sensors, Modulation transfer functions, Radiography, Digital imaging, Spatial resolution

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