Prof. Eiji Higurashi Profile

Prof. Eiji Higurashi

Associate Professor at Univ of Tokyo

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 13 March 2013 Paper

InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding

A. Higo, L. Li, E. Higurashi, M. Sugiyama, Y. Nakano

Proceedings Volume 8616, 86160X (2013) https://doi.org/10.1117/12.2008337

KEYWORDS: Silicon, Plasma, Semiconductor lasers, Hybrid silicon lasers, Oxygen, Argon, Electromagnetic coupling, Optical components, Compound semiconductors, Waveguides

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Proceedings Article | 10 October 2007 Paper

Room temperature GaN-GaAs direct bonding by argon-beam surface activation

Eiji Higurashi, Yuichiro Tokuda, Masatake Akaike, Tadatomo Suga

Proceedings Volume 6717, 67170L (2007) https://doi.org/10.1117/12.754402

KEYWORDS: Gallium nitride, Gallium arsenide, Etching, Sapphire, Argon, Protactinium, Interfaces, Silicon, Surface roughness, Atomic force microscopy

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Proceedings Article | 18 October 2006 Paper

Low-temperature bonding of a LiNbO3 waveguide chip to a Si substrate in ambient air for hybrid-integrated optical devices

Ryo Takigawa, Eiji Higurashi, Tadatomo Suga, Satoshi Shinada, Tetsuya Kawanishi

Proceedings Volume 6376, 637603 (2006) https://doi.org/10.1117/12.690741

KEYWORDS: Silicon, Gold, Thin films, Optical components, Plasma, Scanning electron microscopy, Waveguides, Argon, Silicon films, Temperature metrology

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Proceedings Article | 6 December 2005 Paper

Low temperature bonding of LiNbO₃ waveguide chips to Si substrates in air

Ryo Takigawa, Eiji Higurashi, Tadatomo Suga, Satoshi Shinada, Tetsuya Kawanishi

Proceedings Volume 6050, 605012 (2005) https://doi.org/10.1117/12.653072

KEYWORDS: Silicon, Plasma, Waveguides, Gold, Argon, Semiconducting wafers, Interfaces, Titanium, Integrated optics, Optical fibers

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Proceedings Article | 25 October 2004 Paper

Hybrid integration technologies for optical micro-systems

Eiji Higurashi, T. Itoh, Tadatomo Suga, R. Sawada

Proceedings Volume 5604, (2004) https://doi.org/10.1117/12.580079

KEYWORDS: Optical alignment, Waveguides, Silicon, Sensors, Blood circulation, Integrated optics, Optical components, Semiconductor lasers, Tissue optics, Computer programming

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