Dr. Elena Cianci Profile

Dr. Elena Cianci

at Istituto di Fotonica e Nanotecnologie

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Publications (11)

Proceedings Article | 23 July 2008 Paper

A new factory for silicon grisms

F. Vitali, V. Foglietti, E. Cianci, D. Lorenzetti

Proceedings Volume 7018, 70184P (2008) https://doi.org/10.1117/12.787525

KEYWORDS: Silicon, Prisms, Prototyping, Anisotropic etching, Semiconducting wafers, Photomasks, Cryogenics, Optical testing, Astronomy, Infrared spectroscopy

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Proceedings Article | 30 September 2003 Paper

Steps in miniaturizing analytical systems

Gianluca de Bellis, Giancarlo Caramenti, Mihaela Ilie, Elena Cianci, Antonio Minotti, Vittorio Foglietti

Proceedings Volume 5227, (2003) https://doi.org/10.1117/12.520122

KEYWORDS: Electrodes, Microfluidics, Silicon, Borosilicate glass, Capillaries, Genetics, Laser induced fluorescence, Wet etching, Turbulence, Fluorescence spectroscopy

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Proceedings Article | 30 September 2003 Paper

Silicate-based spin-on-glass used as adhesive in micromachining

Mihaela Ilie, Vittorio Foglietti, Antonio Minotti, Elena Cianci, Bogdan Marculescu

Proceedings Volume 5227, (2003) https://doi.org/10.1117/12.520099

KEYWORDS: Silicates, Glasses, Silicon, Adhesives, Sodium, Potassium, Liquids, Annealing, Silicate glass, Borosilicate glass

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Proceedings Article | 30 September 2003 Paper

Optimized deep wet etching of borosilicate glass through Cr-Au-resist mask

Mihaela Ilie, Vittorio Foglietti, Elena Cianci, Antonio Minotti

Proceedings Volume 5227, (2003) https://doi.org/10.1117/12.520071

KEYWORDS: Etching, Chromium, Glasses, Wet etching, Photomasks, Borosilicate glass, Gold, HF etching, Optical lithography, Metals

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Proceedings Article | 2 September 2003 Paper

Fabrication and operation of Er-Yb glass waveguide laser arrays at 1.5 um

Gin Jose, Gino Sorbello, Stefano Taccheo, Robert Osellame, Roberta Ramponi, Vittorio Foglietti, Elena Cianci, Paolo Laporta

Proceedings Volume 5121, (2003) https://doi.org/10.1117/12.515567

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Proceedings Article | 30 January 2003 Paper

Fabrication of silicon grisms

Fabrizio Vitali, Elena Cianci, Vittorio Foglietti, Dario Lorenzetti

Proceedings Volume 4842, (2003) https://doi.org/10.1117/12.459460

KEYWORDS: Silicon, Prisms, Spectral resolution, Infrared imaging, Surface finishing, Infrared cameras, Cameras, Anisotropic etching, Telescopes, Semiconducting wafers

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Proceedings Article | 28 September 2001 Paper

Micromachined silicon slits for beam diagnostics in particle accelerators

Elena Cianci, Andrea Notargiacomo, Alessandro Cianchi, Vittorio Foglietti

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442951

KEYWORDS: Silicon, Etching, Semiconducting wafers, Anisotropic etching, Particles, Photomasks, Oxides, Diffraction, Chromium, Diagnostics

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Proceedings Article | 28 September 2001 Paper

Addressable electrodes microarray for biological analysis system

Mihaela Ilie, Elena Cianci, Vittorio Foglietti, Antonio Minotti, Gianluca de Bellis, Giancarlo Caramenti

Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443063

KEYWORDS: Electrodes, Silicon, Glasses, Optical lithography, Wet etching, Laser induced fluorescence, Molecules, Chromium, Etching, Biological research

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Proceedings Article | 28 September 2001 Paper

Silicon grisms fabricated by anisotropic wet etching and direct silicon bonding for high-resolution IR spectroscopy

Elena Cianci, Vittorio Foglietti, Fabrizio Vitali, Dario Lorenzetti

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442946

KEYWORDS: Silicon, Prisms, Semiconducting wafers, Etching, Surface finishing, Wet etching, Infrared spectroscopy, Anisotropic etching, Photomasks, Micromachining

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Proceedings Article | 16 August 2000 Paper

Silicon grisms for high-resolution spectroscopy in the near infrared

Fabrizio Vitali, Elena Cianci, Dario Lorenzetti, Vittorio Foglietti, Andrea Notargiacomo, Ennio Giovine, Ernesto Oliva

Proceedings Volume 4008, (2000) https://doi.org/10.1117/12.395457

KEYWORDS: Silicon, Prisms, Semiconducting wafers, Photomasks, Etching, Anisotropic etching, Electron beam lithography, Interfaces, Telescopes, Astronomy

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Proceedings Article | 15 August 2000 Paper

Development of silicon ultrasonic transducer using micromachining

Giosue Caliano, Fabio Galanello, Vittorio Foglietti, Elena Cianci, Alessandro Caronti

Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395636

KEYWORDS: Silicon, Transducers, Ultrasonics, Silicon films, Annealing, Plasma enhanced chemical vapor deposition, Etching, Semiconducting wafers, Polarization, Micromachining

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Showing 5 of 11 publications

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