Dr. Emma Salmi Profile

Dr. Emma Salmi

at Canatu Oy

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Carbon nanotube membranes for EUV photolithography: a versatile material platform

Jarkko Etula, Ahmed Soliman, Tuhin Ghosh, Bjørn Mikladal, Emma Salmi, Emile Van Veldhoven, Kirill Chernenko, Ilkka Varjos, Taneli Juntunen

Proceedings Volume 12750, 127500M (2023) https://doi.org/10.1117/12.2686790

KEYWORDS: Extreme ultraviolet, Carbon nanotubes, Optical lithography, Pellicles, X-ray photoelectron spectroscopy, Transparency, Transmission electron microscopy, Surface chemistry, Scanning electron microscopy, FT-IR spectroscopy

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