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Dr. Evgeny L. Pankratov
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Publications (1)
Proceedings Article | 26 February 2010 Paper
Optimization of near-surficial annealing for decreasing of depth of p-n-junction in semiconductor heterostructure
Proceedings Volume 7521, 75211D (2010) https://doi.org/10.1117/12.853230
KEYWORDS: Annealing, Diffusion, Heterojunctions, Semiconductors, Microwave radiation, Electroluminescence, Semiconductor lasers, Interfaces, Solid state electronics, Solids
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