Dr. Fabian C. Martinez Profile

Dr. Fabian C. Martinez

at Intel Corp

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Publications (3)

Proceedings Article | 23 March 2012 Paper

EUVL multilayer mask blank defect mitigation for defect-free EUVL mask fabrication

Pei-Yang Yan, Yan Liu, Marilyn Kamna, Guojing Zhang, Robert Chen, Fabian Martinez

Proceedings Volume 8322, 83220Z (2012) https://doi.org/10.1117/12.927018

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Scanning electron microscopy, Defect inspection, Electron beam lithography, Precision measurement, Silica, Optical alignment, Inspection, Atomic force microscopy

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Proceedings Article | 18 March 2009 Paper

Compensation of overlay errors due to mask bending and non-flatness for EUV masks

Manish Chandhok, Sanjay Goyal, Steven Carson, Seh-Jin Park, Guojing Zhang, Alan Myers, Michael Leeson, Marilyn Kamna, Fabian Martinez, Alan Stivers, Gian Lorusso, Jan Hermans, Eric Hendrickx, Sanjay Govindjee, Gerd Brandstetter, Tod Laursen

Proceedings Volume 7271, 72710G (2009) https://doi.org/10.1117/12.814428

KEYWORDS: Extreme ultraviolet, Photomasks, Finite element methods, Reticles, Error analysis, Thin films, Photovoltaics, Data modeling, Distortion, Image registration

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Proceedings Article | 17 October 2008 Paper

Pattern placement correction due to bending in EUVL masks

Seh-Jin Park, Chandhok Manish, Marilyn Kamna, Chuan Hu, Guojing Zhang, Fabian Martinez, Nathan Wilcox, Kamgmin Hsia, Alan Stivers

Proceedings Volume 7122, 71222C (2008) https://doi.org/10.1117/12.801542

KEYWORDS: Extreme ultraviolet lithography, Photomasks, Metrology, Thin films, Personal protective equipment, Distortion, Image registration, Thin film deposition, Extreme ultraviolet, Reticles

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