Fan Xiao
at Institute of Semiconductors CAS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 November 2021 Paper
Proceedings Volume 12057, 120571F (2021) https://doi.org/10.1117/12.2604785
KEYWORDS: Waveguides, Photodetectors, Photonic integrated circuits, Photodiodes, Capacitance, Semiconducting wafers, Resistance, Integrated circuits, Integrated circuit design, Etching

Proceedings Article | 1 November 2021 Paper
Proceedings Volume 12057, 1205729 (2021) https://doi.org/10.1117/12.2605789
KEYWORDS: Photodetectors, Absorption, Antireflective coatings, Resistance, Sensors, Reflectivity, Palladium, Reflection, Metalorganic chemical vapor deposition

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