VCSELs emitting in the red spectral range are auspicious candidates for various applications, for example in biomedical utilization. However, their implementation is occasionally hampered especially due to the limited fiber coupling efficiency resulting from the beam divergence further increasing for higher power emission, where higher order transverse modes are emitted. Hence, the emission of a highly collimated Gaussian beam at raised output power is pursued in this work. The suppression of higher order modes through etched surface reliefs spatially modulating the reflectivity is investigated. To reduce the angle of divergence, polymer microlenses are integrated directly on the VCSEL surface.
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