Dr. Feng Tang Profile

Dr. Feng Tang

at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Author

Publications (18)

SPIE Journal Paper | 11 March 2023

Fast measurement of wavefront aberration in double-grating Ronchi lateral shearing interferometry

Yunjun Lu, Feng Tang, Zhongliang Li, Xiangzhao Wang

OE, Vol. 62, Issue 03, 034105, (March 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.3.034105

KEYWORDS: Phase shifts, Ronchi rulings, Wavefront errors, Wavefronts, Wavefront aberrations, Diffraction, Interferometry, Interferograms, Optical engineering, Optical gratings

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Proceedings Article | 27 March 2022 Paper

Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats

Xiangyu Wei, Rong Su, Feng Tang, Xiangzhao Wang

Proceedings Volume 12169, 12169AY (2022) https://doi.org/10.1117/12.2626352

KEYWORDS: Fizeau interferometers, Semiconducting wafers, Monochromatic aberrations, Error analysis, Silicon, Wafer-level optics, Zernike polynomials, Wavefronts, Ray tracing, Interferometers

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SPIE Journal Paper | 14 December 2021

Measurement of the magnification and distortion of high-precision imaging system using dual-fiber point diffraction interferometer

Yisha Cao, Feng Tang, Xiangzhao Wang, Yang Liu, Peng Feng, Yunjun Lu, Fudong Guo

OE, Vol. 60, Issue 12, 124107, (December 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.12.124107

KEYWORDS: Distortion, Imaging systems, Reticles, Error analysis, Diffraction, Optical fibers, Wavefront aberrations, Point diffraction interferometers, Optical engineering, Nickel

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Proceedings Article | 10 October 2020 Presentation + Paper

FFT wavefront reconstruction algorithm with periodical extension for lateral shearing interferometry

Peng Li, Feng Tang, Xiangzhao Wang

Proceedings Volume 11552, 1155203 (2020) https://doi.org/10.1117/12.2573639

KEYWORDS: Reconstruction algorithms, Wavefronts, Wavefront reconstruction, Interferometry, Error analysis, Shearing interferometers, Fourier transforms, Computer simulations

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SPIE Journal Paper | 26 September 2020

Calibration method of shear amount based on the optical layout of point source microscope for lateral shearing interferometric wavefront sensor

Changzhe Peng, Feng Tang, Xiangzhao Wang, Jie Li

OE, Vol. 59, Issue 09, 094106, (September 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.9.094106

KEYWORDS: Calibration, Wavefront sensors, Wavefronts, Diffraction gratings, Diffraction, Sensors, Optical engineering, Interferometry, Sensor calibration, Phase retrieval

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SPIE Journal Paper | 31 March 2020

Relationship between shear ratio and reconstruction accuracy in lateral shearing interferometry

Peng Li, Feng Tang, Xiangzhao Wang

OE, Vol. 59, Issue 03, 034113, (March 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.3.034113

KEYWORDS: Wavefronts, Interferometry, Signal to noise ratio, Zernike polynomials, Optical engineering, Error analysis, Wavefront reconstruction, Reconstruction algorithms, Lithium, Dynamical systems

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SPIE Journal Paper | 31 May 2019

Measuring cone angle of axicon using scanning Fizeau interferometer

Yan Yan, Feng Tang, Xiangzhao Wang, Yunjun Lu, Fudong Guo

OE, Vol. 58, Issue 05, 054107, (May 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.5.054107

KEYWORDS: Axicons, Interferometers, Fizeau interferometers, Calibration, Error analysis, Optical engineering, Distance measurement, Interferometry, Phase shifts, Light sources

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Proceedings Article | 2 November 2018 Paper

Compact lateral shearing interferometer based on circular modified Hartmann mask

Changzhe Peng, Feng Tang, Xiangzhao Wang, Abel Kamagara, Jie Li

Proceedings Volume 10819, 108190M (2018) https://doi.org/10.1117/12.2501010

KEYWORDS: Diffraction gratings, Diffraction, Shearing interferometers, Wavefronts, Wavefront sensors, Interferometers

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Proceedings Article | 10 January 2018 Paper

A method for improving the measurement accuracy of lateral shearing interferometry

Jie Li, Feng Tang, Xiangzhao Wang, Rongsheng Ba, Xinda Zhou, Yinbo Zheng, Lei Ding, Bo Chen, Xiaoyu Yang, Jing Yuan

Proceedings Volume 10618, 106180P (2018) https://doi.org/10.1117/12.2286323

KEYWORDS: Wavefronts, Sensors, Zernike polynomials, Calibration, Interferometry, Monochromatic aberrations, Error analysis, Extreme ultraviolet, Geometrical optics, Shearing interferometers

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SPIE Journal Paper | 22 February 2017

Method for improving measurement efficiency of lateral shearing interferometry

Jie Li, Feng Tang, Xiangzhao Wang, Fengzhao Dai, Lei Ding, Bo Chen, Xiaoyu Yang, Liqun Chai

OE, Vol. 56, Issue 02, 024107, (February 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.2.024107

KEYWORDS: Wavefronts, Error analysis, Zernike polynomials, Interferometry, Wavefront reconstruction, Optical engineering, Computer simulations, Statistical analysis, Optical testing, Sensors

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Proceedings Article | 15 March 2016 Paper

Pixel-based mask optimization via particle swarm optimization algorithm for inverse lithography

Lei Wang, Sikun Li, Xiangzhao Wang, Chaoxing Yang, Feng Tang

Proceedings Volume 9780, 97801V (2016) https://doi.org/10.1117/12.2230404

KEYWORDS: Source mask optimization, Particle swarm optimization, Lithography, Optical lithography, Resolution enhancement technologies, Photomasks, Particles, Molybdenum, Algorithm development, Manufacturing

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Proceedings Article | 13 March 2015 Paper

Calibration of system errors in lateral shearing interferometer for EUV-wavefront metrology

Jie Li, Feng Tang, Xiangzhao Wang, Fengzhao Dai, Feibin Wu

Proceedings Volume 9422, 94222O (2015) https://doi.org/10.1117/12.2180265

KEYWORDS: Wavefronts, Sensors, Monochromatic aberrations, Calibration, Extreme ultraviolet lithography, Interferometry, Extreme ultraviolet, EUV optics, Zernike polynomials, Error analysis

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SPIE Journal Paper | 13 November 2014

In situ aberration measurement method using a phase-shift ring mask

Sikun Li, Xiangzhao Wang, Jishuo Yang, Lifeng Duan, Feng Tang, Guanyong Yan

JM3, Vol. 14, Issue 01, 011005, (November 2014) https://doi.org/10.1117/12.10.1117/1.JMM.14.1.011005

KEYWORDS: Photomasks, In situ metrology, Process modeling, Image processing, Lithography, Principal component analysis, Error analysis, Image retrieval, Semiconducting wafers, Zernike polynomials

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Proceedings Article | 13 November 2014 Paper

A high-accuracy subaperture stitching system for nonflatness measurement of wafer stage mirror

Yunjun Lu, Feng Tang, Xiangzhao Wang, Yong Li, Xiulong Wan, Fudong Guo, Fengzhao Dai

Proceedings Volume 9276, 927617 (2014) https://doi.org/10.1117/12.2071824

KEYWORDS: Mirrors, Interferometers, Calibration, Surface finishing, Photovoltaics, Polishing, Semiconducting wafers, Spatial resolution, Optical testing, Lithography

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Proceedings Article | 31 March 2014 Paper

In situ aberration measurement method using a phase-shift ring mask

Xiangzhao Wang, Sikun Li, Jishuo Yang, Feng Tang, Guanyong Yan, Andreas Erdmann

Proceedings Volume 9052, 90521J (2014) https://doi.org/10.1117/12.2046257

KEYWORDS: Photomasks, In situ metrology, Lithography, Principal component analysis, Process modeling, Image processing, Zernike polynomials, Lenses, Image retrieval, Monochromatic aberrations

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Proceedings Article | 31 March 2014 Paper

A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask

Sikun Li, Xiangzhao Wang, Jishuo Yang, Feng Tang, Guanyong Yan, Andreas Erdmann

Proceedings Volume 9052, 90521L (2014) https://doi.org/10.1117/12.2046649

KEYWORDS: Photomasks, Image processing, Process modeling, In situ metrology, Lithography, Principal component analysis, Image retrieval, Polarization, Error analysis, Databases

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SPIE Journal Paper | 1 June 2008

Simultaneous phase-shifting ellipsometry based on grating beamsplitter

Kun Yang, Aijun Zeng, Xiangzhao Wang, Feng Tang, Hua Wang

OE, Vol. 47, Issue 06, 063602, (June 2008) https://doi.org/10.1117/12.10.1117/1.2948360

KEYWORDS: Ellipsometry, Phase shifts, Beam splitters, Polarizers, Refractive index, Sensors, Error analysis, Hybrid fiber optics, Calibration, Optical engineering

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SPIE Journal Paper | 1 July 2007

Influence of birefringence dispersion on distributed measurement of polarization coupling in birefringent fibers

Feng Tang, Xiangzhao Wang, Yimo Zhang, Wencai Jing

OE, Vol. 46, Issue 07, 075006, (July 2007) https://doi.org/10.1117/12.10.1117/1.2756065

KEYWORDS: Birefringence, Optical fibers, Spatial resolution, Polarization, Dispersion, Light sources, Optical engineering, Sensing systems, Michelson interferometers, Signal to noise ratio

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Showing 5 of 18 publications

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