Mr. Fengyuan Yu Profile

Fengyuan Yu

at Changchun Univ of Science and Technology

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Author

Publications (3)

Proceedings Article | 16 August 2013 Paper

Influence of surfactant on aperture of photo-electro-chemical etching for silicon microchannel plate

Feng-yuan Yu, Qing-duo Duanmu, Yao Zhang, Yong-zhao Liang, Jin Chai, Guo-zheng Wang, Ji-kai Yang

Proceedings Volume 8912, 891207 (2013) https://doi.org/10.1117/12.2031826

KEYWORDS: Silicon, Etching, High aspect ratio silicon micromachining, Microchannel plates, Ions, Electrochemical etching, Interfaces, Silicon photomultipliers, Hydrogen, Silica

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Proceedings Article | 16 August 2013 Paper

Influences of temperature and concentrations on morphology of TMAH anisotropic etching for silicon microchannel plate

Yong-zhao Liang, Qing-duo Duanmu, Ji-kai Yang, Guo-zheng Wang, Jin Chai, Fengyuan Yu, Yao Zhang, Shu-xiao Fan

Proceedings Volume 8912, 89120B (2013) https://doi.org/10.1117/12.2032481

KEYWORDS: Etching, Silicon, Anisotropic etching, Semiconducting wafers, Crystals, Temperature metrology, Scanning electron microscopy, Microchannel plates, Electrochemical etching, Microsystems

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Proceedings Article | 16 August 2013 Paper

Influences of temperature and etching voltage on the surface morphology of photo-electro-chemical etching for silicon microchannel arrays

Yao Zhang, Qingduo Duanmu, Feng-yuan Yu, Yong-zhao Liang, Jin Chai, Guo-zheng Wang, Ji-kai Yang

Proceedings Volume 8912, 891209 (2013) https://doi.org/10.1117/12.2031882

KEYWORDS: Silicon, Etching, Semiconducting wafers, Scattering, Photomicroscopy, Electrodes, Microchannel plates, Temperature metrology, Microelectromechanical systems, Diffusion

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