Dr. Ferdi van de Wetering Profile

Dr. Ferdi van de Wetering

at ASML Netherlands B.V.

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Publications (2)

Proceedings Article | 23 March 2020 Paper

Understanding EUV-induced plasma and application to particle contamination control in EUV scanners

Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Ferdi van de Wetering, Selwyn Cats, Luuk Heijmans, Andrey Nikipelov, Adam Lassise, Vadim Banine

Proceedings Volume 11323, 113230Y (2020) https://doi.org/10.1117/12.2551020

KEYWORDS: Plasma, Particles, Ions, Extreme ultraviolet, Scanners, Hydrogen, Reticles, Particle contamination

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Proceedings Article | 26 March 2019 Presentation + Paper

Advanced particle contamination control in EUV scanners

Mark van de Kerkhof, Tjarko van Empel, Michael Lercel, Christophe Smeets, Ferdi van de Wetering, Andrey Nikipelov, Christian Cloin, Andrei Yakunin, Vadim Banine

Proceedings Volume 10957, 109570U (2019) https://doi.org/10.1117/12.2514874

KEYWORDS: Particles, Reticles, Scanners, Pellicles, Plasma, Extreme ultraviolet, Particle contamination

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