Dr. Ferenc Riesz Profile

Dr. Ferenc Riesz

Senior Research Fellow at Research Inst for Tech Physics & Materials Science

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Publications (7)

Proceedings Article | 27 May 2011 Paper

Coherence effects in Makyoh topography

Ferenc Riesz

Proceedings Volume 8082, 80822I (2011) https://doi.org/10.1117/12.888968

KEYWORDS: Speckle, Speckle pattern, Diffraction, Semiconductors, Semiconducting wafers, Coherence (optics), Surface roughness, Mirrors, Silicon, Light sources

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Proceedings Article | 17 June 2009 Paper

Makyoh topography studies of the morphology of periodic and quasi-periodic surfaces

Ferenc Riesz

Proceedings Volume 7389, 73892M (2009) https://doi.org/10.1117/12.827337

KEYWORDS: Surface finishing, Semiconducting wafers, Mirrors, Silicon, Polishing, Geometrical optics, Reflection, Inspection, Semiconductors, Collimation

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Proceedings Article | 18 June 2007 Paper

Realisation of quantitative Makyoh topography using a digital micromirror device

Ferenc Riesz, I. Lukács, J. Makai

Proceedings Volume 6616, 66160L (2007) https://doi.org/10.1117/12.726388

KEYWORDS: Digital micromirror devices, Mirrors, Interferometry, Cameras, Semiconducting wafers, Photomasks, Optical components, Off axis mirrors, Collimation, Geometrical optics

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Proceedings Article | 17 August 2004 Paper

Makyoh topography: a simple yet powerful optical method for flatness and defect characterization of mirror-like surfaces

Ferenc Riesz

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546018

KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, Diffraction, Wafer-level optics, Mirrors, Cameras, Geometrical optics, Reflection, Polishing

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Proceedings Article | 19 August 1998 Paper

Makyoh-topography studies of mirrorlike surfaces: toward a quantitative understanding

Ferenc Riesz

Proceedings Volume 3573, (1998) https://doi.org/10.1117/12.320948

KEYWORDS: Lawrencium, Monte Carlo methods, Light sources, Semiconducting wafers, Cameras, Imaging systems, Geometrical optics, Optical simulations, Mirrors, Information operations

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