Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of
view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for
structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of
technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light
interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a
software to simulate automated measurements of known surfaces with specific deviations to test new stitching
algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations,
statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and
misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement
process to test a new image registration technique that allows for the use of correlation of images by fast fourier
transform for small overlaps between single measurements.
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