Dr. FRANCISCO Rafael LEON Profile

Dr. FRANCISCO Rafael LEON

President at Psi-squared Software llc

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Author

Publications (3)

Proceedings Article | 8 December 1995 Paper

Predicting mask performance by numerical simulation

Qi-De Qian, Giang Dao, Pei-yang Yan, Francisco Leon

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228201

KEYWORDS: Photomasks, Semiconducting wafers, Wavefronts, Quartz, Lithography, Phase shifts, Numerical simulations, Maxwell's equations, Data modeling, Mask making

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Proceedings Article | 26 May 1995 Paper

Fast algorithms for 3D high NA lithography simulation

Qi-De Qian, Francisco Leon

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209269

KEYWORDS: 3D modeling, Photomasks, Imaging systems, Lithography, 3D image processing, Computer simulations, Wave propagation, Spatial frequencies, Coherence imaging, 3D image enhancement

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Proceedings Article | 1 July 1991 Paper

Laser alignment modeling using rigorous numerical simulations

Gregory Wojcik, David Vaughan, John Mould, Francisco Leon, Qi-De Qian, Michael Lutz

Proceedings Volume 1463, (1991) https://doi.org/10.1117/12.44789

KEYWORDS: Optical alignment, Chemical elements, 3D modeling, Computer simulations, Radio propagation, Scattering, Optical simulations, Metals, Wave propagation, Light scattering

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