Dr. Frank V. Belanger Profile

Dr. Frank V. Belanger

Research Engineer at Entegris Inc

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Publications (3)

Proceedings Article | 5 April 2007 Paper

New filter media development for effective control of trimethysilanol (TMS) and related low molecular weight silicon containing organic species in the photobay ambient

Anatoly Grayfer, Frank Belanger, Phillip Cate, David Ruede

Proceedings Volume 6518, 651842 (2007) https://doi.org/10.1117/12.712208

KEYWORDS: Silicon, Digital filtering, Adsorption, Calibration, Contamination, Chemical analysis, Optical components, Lithography, Semiconductor manufacturing, Carbon

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Proceedings Article | 5 April 2007 Paper

Contrarian approach to and ultimate solution for 193nm reticle haze

Oleg Kishkovich, Anatoly Grayfer, Frank Belanger

Proceedings Volume 6518, 65183R (2007) https://doi.org/10.1117/12.712325

KEYWORDS: Reticles, Air contamination, Pellicles, Photomasks, Quartz, Manufacturing, Chromium, Scanners, Contamination, Humidity

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Proceedings Article | 12 May 2005 Paper

Examination of the prevalence and abundance of noncondensable, nonreactive optical surface contaminants in the scanner environment

F. Belanger, P. Cate, A. Grayfer, R. Petersen, D. Ruede

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.610665

KEYWORDS: Silicon, Contamination, Optical filters, Scanners, Head-mounted displays, Absorption, Optical lithography, Photoresist materials, Chemical analysis, Chemical elements

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