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Dr. Frank J. Ruess
at Univ of New South Wales
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Publications (1)
Proceedings Article | 28 February 2005 Paper
The fabrication of devices in silicon using scanning probe microscopy
Frank Ruess, Lars Oberbeck, Michelle Simmons, Kuan Eng Goh, Alex Hamilton, Toby Hallam, Neil Curson, Robert Clark
Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.582283
KEYWORDS: Silicon, Scanning tunneling microscopy, Chemical species, Phosphorus, Hydrogen, Scanning probe microscopy, Lithography, Optical lithography, Electron transport, Quantum computing
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