Mr. Fu-Sheng Yang Profile

Fu-Sheng Yang

at National Taiwan Univ

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Author

Publications (6)

Proceedings Article | 9 April 2024 Poster + Paper

AI-enhanced optical critical dimension metrology for high aspect ratio structures in semiconductor advanced packaging

Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Zih-Ying Fu, Liang-Chia Chen

Proceedings Volume 12956, 129560Y (2024) https://doi.org/10.1117/12.3012984

KEYWORDS: Scatterometry, Deep ultraviolet, Short wave infrared radiation, Artificial neural networks, Critical dimension metrology, Finite-difference time-domain method, Cadmium, Simulations, Scatter measurement, Reflection

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Proceedings Article | 15 August 2023 Presentation + Paper

AI-guided numerical-aperture-controlled scatterometry for measurement of deep HAR and thin-film structures with a large depth variation

Zih-Ying Fu, Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Liang-Chia Chen

Proceedings Volume 12618, 1261805 (2023) https://doi.org/10.1117/12.2673608

KEYWORDS: Reflectivity, Thin films, Scatterometry, Film thickness, Polarization, Artificial neural networks, Spectroscopy

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Proceedings Article | 10 August 2023 Presentation + Paper

Non-integral model-based scatterometry for single-structure OCD metrology

Wei-Hsin Chein, Fu-Sheng Yang, Zi-Ying Fu, Liang-Chia Chen

Proceedings Volume 12619, 126190H (2023) https://doi.org/10.1117/12.2673318

KEYWORDS: Model-based design, Scatterometry, Metrology, Critical dimension metrology, Beam shaping, Diffraction

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Proceedings Article | 27 April 2023 Presentation + Paper

Artificial-neural-network-assisted DUV scatterometry for OCD on HAR sub-micron structures

Zih-Ying Fu, Wei-Hsin Chein, Fu-Sheng Yang, Liang-Chia Chen

Proceedings Volume 12496, 124960E (2023) https://doi.org/10.1117/12.2657642

KEYWORDS: Artificial neural networks, Scatterometry, Deep ultraviolet, Data modeling, Scanning electron microscopy, Particle swarm optimization, Systems modeling, Reflection, Finite-difference time-domain method, Statistical modeling

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Proceedings Article | 27 April 2023 Presentation + Paper

AI-guided OCD metrology for single HAR sub-micron via measurement

Fu-Sheng Yang, Zih-Ying Fu, Liang-Chia Chen

Proceedings Volume 12496, 124961A (2023) https://doi.org/10.1117/12.2658279

KEYWORDS: Finite-difference time-domain method, Education and training, Metrology, Scanning electron microscopy, Packaging, Manufacturing, Computer simulations, Tolerancing, Semiconductors, Scatterometry

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Proceedings Article | 24 May 2022 Presentation + Paper

New critical dimension optical metrology for submicron high-aspect-ratio structures using spectral reflectometry with supercontinuum laser illumination

Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen

Proceedings Volume 12137, 121370E (2022) https://doi.org/10.1117/12.2621895

KEYWORDS: Reflectometry, Spectroscopy, Scanning electron microscopy, Laser metrology, Image processing, Optical metrology, Etching, Critical dimension metrology, Objectives, Laser sources

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Showing 5 of 6 publications

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