Silicon photonics has emerged as an attractive technology for developing low-cost and high-speed optical communication and optical interconnects. We design a test station which enables semi-automatic for optical-optical and electro-optical testing of passive and active device. Advances in automated wafer-level optical test enable statistical photonic device characterization for development, photonic modeling, and manufacturing controls. Meanwhile we study the influence of fiber tilt angle and height on the measurement.
IMECAS is developing a silicon photonics process platform based on existing 22nm CMOS platform. Developing this platform requires continuous process optimization and design verification, so the wafer-level test solution presented in this paper plays an extremely important role in process validation and optimization. We design a test station which enables manual and semi-automatic for optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, grating couplers, splitter, photo-detectors, modulators etc. It is compatible with 200mm wafer-level testing and Die-level testing. Meanwhile, it has two coupling ways: horizontal coupling and vertical coupling. The measured repeatability of S-parameters and IV is within 6α.
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