CONFERENCE PROCEEDINGS
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Fumihiko Okabe
at Kuraray Co Ltd
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 6 April 2007 Paper
Dissolution behavior of resist polymers studied by Quartz-Crystal-Microbalance method II
Proceedings Volume 6519, 651913 (2007) https://doi.org/10.1117/12.711926
KEYWORDS: Polymers, Protactinium, Data modeling, Statistical analysis, Solids, Interfaces, Quartz, Crystals, Liquids, Modulation
Proceedings Article | 22 March 2007 Paper
Observing morphology on surface of poly(methacrylate) in ArF lithography using AFM phase image
Proceedings Volume 6519, 65193W (2007) https://doi.org/10.1117/12.711392
KEYWORDS: Polymers, Line edge roughness, Atomic force microscopy, Coating, Polymer thin films, Lithography, Molecules, Atomic force microscope, Chemically amplified resists, Polymerization
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