Mr. Gabriel Zacca Profile

Gabriel Zacca

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Overlay metrology performance of dry photoresist towards high NA EUV lithography

Eren Canga, Victor Blanco, Anne-Laure Charley, Cyrus Tabery, Gabriel Zacca, Nader Shamma, Benjamin Kam, Mohand Brouri

Proceedings Volume 12955, 129551R (2024) https://doi.org/10.1117/12.3010115

KEYWORDS: Overlay metrology, Etching, Photoresist materials, Extreme ultraviolet lithography, Lithography, Diffraction gratings, Diffraction, Reproducibility, Photoresist developing, Metrology

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Proceedings Article | 27 April 2023 Presentation + Paper

Alignment and overlay through opaque metal layers

V. Blanco Carballo, E. Canga, C. Jehoul, A. Moussa, A. Tamaddon, C. Tabery, G. Gunjala, B. Menchtchikov, V. Zacca, S. Lalbahadoersing, A. den Boef, R. Synowicki

Proceedings Volume 12496, 124960I (2023) https://doi.org/10.1117/12.2658084

KEYWORDS: Ruthenium, Optical alignment, Semiconducting wafers, Overlay metrology, Oxides, Silicon, Metals, Etching, Scanners, Copper

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