Mr. Gaku Shibata Profile

Gaku Shibata

at Shizuoka Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 3 September 2019 Paper

Measurement of patterned surfaces with non-fluorescent structured illumination microscope

S. Usuki, G. Shibata, Kenjiro Miura

Proceedings Volume 11102, 111021L (2019) https://doi.org/10.1117/12.2529023

KEYWORDS: Microscopy, Image processing, Microscopes, Imaging systems, Diffraction, Image resolution, Speckle, Light sources, Michelson interferometers, Optical microscopes

Read Abstract +

Patterned surfaces which include semiconductor devices, optical components and other functional surfaces play important role in recent manufacturing. Optical measurements with non-destructive property is available for them but further improvement in spatial resolution and throughput are necessary. In this study, structured illumination microscopy was employed for high-resolution wide-field measurement. Structured illumination microscopy has been usually applied for fluorescent bio-imaging. For non-fluorescent imaging and industrial applications, one problem is speckle noise in structured illumination generation and another problem is vibration and thermal drift in high-precision positioning of laser-interference standing-wave illumination. In our development, the phase of the structured illumination is detected as a fringe signal with another interferometric measurement system, which is employed by structured illumination microscopy as originally developed; it uses a low-coherence light source for high-resolution and low-speckle imaging. We constructed an optical system consisting of plural Michelson interferometers, which allow the low-coherence interference fringes to be manipulated on a sample and the phase to be detected on another sensor. Feeding back the phase of structured illumination through super-resolution processing allows robust imaging despite vibrations, drifting, and environmental changes. A series of experiments were performed to verify our developed microscope system applied for measurement of patterned surfaces.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years