This research presents the integration of ultra low loss (<1dB/cm) silicon nitride waveguides with a superconducting single photon detector with photon number resolving (PNR) capability - the Microwave Kinetic Inductance Detector - introducing a new photonic integrated circuit platform. Our approach is to integrate waveguides and MKIDs on a sapphire substrate, which minimizes the two level system noise for the MKIDs and serves as a bottom cladding for waveguides. Silicon nitride is used as the core of the waveguides and either SiO2 or SiOxNy is used as the top cladding. We present findings on how the fabrications processes -- including the materials used and the method of deposition -- affect the quality of the MKIDs and waveguides. The integrated system would ultimately be used to make photon number resolving detectors for quantum information applications and high resolution spectrometers for astrophysics and metrology applications.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.