The power and brightness of electron-impact micro-focus X-ray sources have long been limited by thermal damage in the
anode. Here we describe a novel X-ray microfocus source based on a new anode concept, the liquid-metal-jet anode
(MetalJet). The regenerative nature of this anode allows for significantly higher e-beam power density than on conventional
anodes, resulting in this source generating significantly higher brightness than other X-ray tubes in the microfocus regime
(~5-50 μm). We describe the fundamental properties of the technology and will review the current status specifically in
terms of spot size, stability, lifetime, flux, acceleration voltage and brightness.
Computed angle scan tomography has been implemented for the first time using sample raster scanning in a scanning
transmission X-ray microscope. The experimental apparatus, acquisition and data analysis procedures, and first results
from fully hydrated river biofilm samples measured from 528-534 eV are reported. The multiple energy images are
processed to 3-dimensional quantitative chemical maps of major biological components, such as proteins,
polysaccharides and lipids.
Cr/Sc multilayers have been grown on Si substrates using DC magnetron sputtering. The multilayers are intended as condenser mirrors in a soft x-ray microscope operating at the wavelength 3.374 nm. They were designed for normal reflection of the first and second order with multilayer periods of 1.692 nm and 3.381 nm, and layer thickness ratios of 0.471 and 0.237, respectively. At-wavelength soft x-ray reflectivity measurements were carried out using a reflectometer with a compact soft x-ray laser-plasma source. The multilayers were irradiated during growth with Ar ions, varying both in energy (9-113 eV) and flux, in order to stimulate the ad-atom mobility and improve the interface flatness. It was found that to obtain a maximum soft x-ray reflectivity with a low flux (Cr=0.76, Sc=2.5) of Ar ions a rather high energy of 53 eV was required. Such energy also caused intermixing of the layers. By the use of a solenoid surrounding the substrate, the arriving ion-to-metal flux ratio could be increased 10 times and the ion energy could be decreased. A high flux (Cr=7.1, Sc=23.1) of low energy (9 eV) Ar ions founded the most favorable growth condition in order to limit the intermixing with a subsistent surface flatness.
This paper describes a new method for improved determination of multilayer period using a soft x-ray reflectometer based on a line-emitting high-brightness water-window liquid-jet laser- plasma source. The use of line emission with well-known wavelengths allows accurate measurements of multilayer period without source monochromatization and calibration. By using a new multi-line data analysis procedure the multilayer period of W/B4C mirrors can be determined with an accuracy of 0.001 nm.
We demonstrate a water-window condenser arrangement for transmission x-ray microscopy based on table-top sources. A spherical normal-incidence multilayer mirror is used to focus and monochromatize water-window x-ray emission from a high-brightness droplet-target laser-plasma source. The condenser arrangement is compact, has high collection efficiency, and is easy to align. The maximum normal- incidence reflectivity at the desired wavelength, (lambda) equals 3.37 nm, was determined to be up to 3 percent. The potential for compact water-window transmission x-ray microscopy using the condenser arrangement is discussed.
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