Dr. Gowri P. Kota Profile

Dr. Gowri P. Kota

at Lam Research Corp

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Author

Publications (2)

Proceedings Article | 1 July 2003 Paper

Advanced process control for polysilicon gate etching using integrated optical CD metrology

Gowri Kota, Jorge Luque, Vahid Vahedi, Ashok Khathuria, Thaddeus Dziura, Ady Levy

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.487635

KEYWORDS: Critical dimension metrology, Etching, Scanning electron microscopy, Semiconducting wafers, Process control, Transistors, Metrology, Wafer-level optics, Cadmium, Integrated optics

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Proceedings Article | 26 June 2003 Paper

Advanced process control applied to 90-nm node lithography and etch

Gowri Kota, Jorge Luque, Mircea Dusa, Adolph Hunter

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.484987

KEYWORDS: Etching, Critical dimension metrology, Semiconducting wafers, Lithography, Process control, Optical lithography, Metrology, Cadmium, Stars, Silicon

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