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Guanghua Yang
at Academy of Opto-Electronics CAS
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Publications (4)
Proceedings Article | 24 January 2019 Paper
Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light
Zengxiong Lu, Yuejing Qi, Jiani Su, Qingyang Zhang, Bing Li, Guanghua Yang, Wei Qi
Proceedings Volume 10840, 1084003 (2019) https://doi.org/10.1117/12.2505387
KEYWORDS: Diffraction, Wavefronts, Calibration, Wavefront sensors, Sensors, Projection systems, Lithography, Metrology, Phase measurement, Scanners
Proceedings Article | 24 January 2019 Paper
Research on micro displacement measurement technology based on chromatic confocal method
Proceedings Volume 10840, 108401G (2019) https://doi.org/10.1117/12.2505383
KEYWORDS: Colorimetry, Confocal microscopy, Sensors, Chromatic aberrations, Spectrometers, Calibration, Zemax
Proceedings Article | 18 January 2019 Paper
The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer
Proceedings Volume 10839, 108390X (2019) https://doi.org/10.1117/12.2505151
KEYWORDS: Interferometers, Motion measurement
Proceedings Article | 16 January 2019 Paper
Design of digital light processing mini-projection lens
Proceedings Volume 10838, 108381F (2019) https://doi.org/10.1117/12.2506238
KEYWORDS: Digital Light Processing, Distortion, Lens design, Modulation transfer functions, Digital micromirror devices, Prisms, Monochromatic aberrations, Image quality, Zemax, Micromirrors
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