Microbolometers with ultrathin and efficient absorber can improve specific detectivity and response time. Resonance enhanced absorber increases thermal mass and hence reduces response time. However, for an ultrathin film to absorb light efficiently, the dielectric function of the film and its thickness must satisfy strict requirements. We experimentally demonstrate an average absorptance of 48% +/-2.5% in the 8–13 microns (769–1250 cm-1) spectral range for 10nm thick titanium nitride (TiN) supported by 100nm thick SiN suspended membrane, a value bordering on the fundamental absorptance limit of 50%.
Ultrathin absorber can improve specific detectivity and response time of microbolometers. We experimentally demonstrate an average absorptance of 48% +/- 2.5% in the 8-13 microns (769-1250 1/cm) spectral range in 10nm thick titanium nitride (TiN), a value bordering on the 50% fundamental absorptance limit for a suspended thin film. Such absorptance is close to the fundamental limit of 50% for free-standing ultrathin films.
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