Super resolution image restoration algorithm proposed in this paper uses the method of maximum likelihood estimation (MLE) to take image restoration processing of 2D steps image scanned by differential confocal imaging system, assuming that the image is based on Poisson distribution. For optical imaging system, this paper puts forward the more accurate point spread function (PSF) and the concept of image interval matching, and introduces automatic acceleration method and the iteration terminating standard. Experiments on the 2-D image of standard steps indicated that a lateral resolution of 0.1μm has achieved and the recovery time has been obviously shorten.
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