Mr. Gug-Young Kim Profile

Gug-Young Kim

at Hanyang Univ

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Publications (1)

Proceedings Article | 12 November 2024 Poster + Paper

Source optimization for the whole arc slit with minimum optical proximity correction applied to contact hole patterns

Da-Kyung Yu, Min-Woo Kim, Gug-Yong Kim, Yu-Jin Chae, Seoung-woo Son, Michael Yeung, Hye-Keun Oh

Proceedings Volume 13215, 132151A (2024) https://doi.org/10.1117/12.3036974

KEYWORDS: Light sources and illumination, Optical proximity correction, Optical lithography, Extreme ultraviolet lithography, Light sources, Manufacturing, Lithography, Mathematical optimization, Source mask optimization

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