Dr. Guodong Cui Profile

Dr. Guodong Cui

at Shanghai Micro Electronics Equipment Co Ltd

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Publications (1)

Proceedings Article | 14 July 2015 Paper

Numerical investigation of temperature field Induced by dual wavelength lasers in sub-microsecond laser annealing technology for insulated gate bipolar transistor

GuoDong Cui, Mingying Ma, Fan Wang, Gang Sun, Yanping Lan, Wen Xu

Proceedings Volume 9532, 953223 (2015) https://doi.org/10.1117/12.2186011

KEYWORDS: Annealing, Field effect transistors, Temperature metrology, Pulsed laser operation, Laser applications, Semiconducting wafers, Absorption, Semiconductor lasers, Laser systems engineering, Silicon

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