The deflection analysis of a micro silicon cantilever beam actuated by electrostatic force is presented in this paper, from analysis, it has been shown that the force applied on the cantilever varies according to the deflection of cantilever, so, it is difficult to solve the differential equation of the deflection, especially, and the load is changing. A new increment method to solve this problem is presented, the cantilever is divided into a number of small segments, it is assumption that every segment has a constant concentrated force, and the electrostatic force is loaded on step by step, when the segment and load step is small enough, the simulation result will be limited to accuracy. In the same time, the frequency of the cantilever is also obtained.
A new type of high isolation RF MEMS switch is studied in this paper. The structure of cantilever beam with electrodes Sandwiched between Si and SiO2 layers has been evaluated. The top and bottom dielectric materials separate two conducting electrodes when actuated. Therefore the reliability has been improved greatly. The curves of the cantilever beam and the voltage have been simulated.
The inhomogeneous silicon cantilever beam is used to the design of micro-relay, compared the properties with the inhomogeneous and homogeneous cantilever beam, we get the results as: the inhomogeneous cantilever beam has a lower drive power than that of homogeneous; when the same drive power, the pressure of the touch point of the inhomogeneous cantilever is greater than that of homogeneous, but the frequency of the inhomogeneous cantilever is lower than that of homogeneous. In some special cases, if the frequency and dynamic response does not require high precision, the inhomogeneous cantilever beam is a good choice; it can obtain a low driver power and high pressure on the touch point for the micro-relay. The deflection of and the frequency of the analysis of the inhomogeneous silicon cantilever beam for micro-relay is put forward in the paper.
A new type microaccelerometer with magnetorheological (MR) fluids is presented in this paper. MR fluids can easily change from a fluid state to a semi-solid state in milliseconds when exposed to magnetic field. They are applied to the microaccelerometer where the MR fluids can vary the relative dielectric constant and provide damping. Then the electrostatic force has been adopted in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer will be expanded. The mathematical model of the microaccelerometer with MR fluids is derived. The curve of the accelerometer between the deflection of the silicon doubly-supported beam and voltage has been simulated. The curves of the accelerometer between the voltage and the acceleration are also got. Last, the stability of the microaccelerometer system has been analyzed.
Double sided touch mode capacitive pressure sensor offered better performance than that of single sided one. Double-sided touch mode capacitive pressure sensor almost has the same character of the single sided one, which can be divided into four regions (normal region, transition region, linear region, saturation region). In the linear region, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantage of the double-sided capacitive pressure sensor of operation is near linear output characteristics, large over range pressure and robust structure. It has not only the advantage of the single sided one, but also higher sensitivity and more dependable without increasing the fabrication significantly, this is what really counts. The principle, design and fabrication process of double sided touch mode capacitive pressure sensor are discussed in this paper.
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