Dr. Gwo-Sheng Peng Profile

Dr. Gwo-Sheng Peng

at Industrial Technology Research Institute

SPIE Involvement:

Author

Proceedings Article | 19 August 2005 Paper

A comparison study on the measurement of nanoparticles

Chen-Yu Wang, Shan-Peng Pan, Gwo-Sheng Peng, Jen-Hui Tsai

Proceedings Volume 5879, 587910 (2005) https://doi.org/10.1117/12.616440

KEYWORDS: Transmission electron microscopy, Particles, Nanoparticles, Atomic force microscopy, Standards development, Statistical analysis, Calibration, Optical spheres, Nanotechnology, Dynamic light scattering

Read Abstract +

Proceedings Article | 20 November 2003 Paper

Traceability in metrology and uncertainty evaluation of a calibration system for GPS receivers

Chiung-Wu Lee, Ta-Kang Yeh, Gwo-Sheng Peng

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.505610

KEYWORDS: Global Positioning System, Calibration, Receivers, Satellites, Geodesy, Metrology, Standards development, Troposphere, Information operations, Distance measurement

Read Abstract +

Proceedings Article | 20 November 2003 Paper

Pitch calibration by reflective laser diffraction

Chao-Jung Chen, Shen-Peng Pan, Liang-Chih Chang, Gwo-Sheng Peng

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.505559

KEYWORDS: Diffraction, Atomic force microscope, Calibration, Helium neon lasers, Diffraction gratings, Interferometers, Reflectivity, Metrology, Sensors, Refractive index

Read Abstract +

Proceedings Article | 3 November 2003 Paper

Novel planar laser encoder system for two-dimensional positioning with ultrahigh head-to-scale alignment tolerance

Chyan-Chyi Wu, Calvin Chang, Ching-Fen Kao, Gwo-Sheng Peng

Proceedings Volume 5173, 517307 (2003) https://doi.org/10.1117/12.504442

KEYWORDS: Computer programming, Tolerancing, Diffraction gratings, Optical design, Optical alignment, Laser development, Diffraction, Interferometers, Polarization, Lithography

Read Abstract +

Laser encoders overcome the fundamental resolution limit of geometrical optical encoders by cleverly converting the diffraction limit to phase coded information so as to facilitate nanometer displacement measurement. As positioning information is coded within the optical wavefront of laser encoders, interferometry principles must be adopted in the design of the laser encoders. This effect has posed a very strong alignment tolerance among various components of the whole laser encoder, which in turn imposes a serious user adaptation bottleneck. Out of all alignment tolerances, the head-to-scale alignment tolerance represents the most important hindrance for wider ap-plications. This paper presents a novel laser planar encoder, which serves as a two-dimensional position detection apparatus for precision machine applications and can provide a measuring resolution less than 1 nm. Improving the IBM laser optical encoder design by taking into consideration manufacturing tolerance of various optical components, an innovative two-dimensional laser encoder with ultra high head-to-scale tolerance is presented. It was identified that this newly proposed laser encoder design could avoid the effect of differences in polarization diffraction efficiencies for the 2-D grating scale used. Optimizing the system performance by cleverly designing the profile of the 2-D grating scale was also detailed. The effect of non-uniform temperature field within the head-to-scale range that can yield a nonzero initial phase so as to decrease the system measurement accuracy was analyzed. In addition, misalignment of the polarizers located in front the photodiodes were identified to be the main cause for imperfect Lissajous circles, which may lower the measuring resolution when traditional arctangent algorithm was adopted for circular polarization interferometers. The resolution of the newly developed laser planar encoder was verified by experiments and was found to agree well with the theoretical predictions.

Proceedings Article | 22 October 2001 Paper

Characterization of inductance probe for gauge block measurement by Fizeau interferometer

Kuo-Ming Chang, Gwo-Sheng Peng

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445641

KEYWORDS: Calibration, Inductance, Fizeau interferometers, Interferometers, Analog electronics, Photodetectors, Servomechanisms, Photography, Mirrors, Metals

Read Abstract +

Proceedings Article | 22 October 2001 Paper

Quadrature phase interferometer used to calibrate dial indicator calibrators

Shau-Chi Huang, Huay-Chung Liou, Gwo-Sheng Peng, Ming-Feng Lu

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445644

KEYWORDS: Calibration, Interferometers, Mirrors, Sensors, Signal processing, Phase interferometry, Digital signal processing, Resistance, Electronic circuits, Digital electronics

Read Abstract +

Proceedings Article | 23 August 1996 Paper

Displacement measurement of a shaker in an accelerometer calibration system

Gwo-Sheng Peng, Chien-ming Wu, Yeu-Jong Huang

Proceedings Volume 2868, (1996) https://doi.org/10.1117/12.248682

KEYWORDS: Interferometers, Calibration, Phase interferometry, Interference (communication), Algorithm development, Interferometry, Homodyne detection, Phase measurement, Erbium, Vibrometry

Read Abstract +

Showing 5 of 7 publications

SPIE Conference Volume | 18 August 2005

Recent Developments in Traceable Dimensional Measurements III

Conference Committee Involvement (2)

Recent Developments in Traceable Dimensional Measurements III

31 July 2005 | San Diego, California, United States

Recent Developments in Traceable Dimensional Measurements II

4 August 2003 | San Diego, California, United States

Keywords/Phrases

Search In:

Publication Years