H. Takishita
at Fujifilm Electronic Materials
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 September 2024 Paper
K. Varga, M. Weinhart, R. Holly, T. Zenger, F. Bögelsack, B. Považay, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke
Proceedings Volume 13273, 132730X (2024) https://doi.org/10.1117/12.3028791
KEYWORDS: Optical lithography, Semiconducting wafers, Lithography, Optical alignment, Matrices, Distortion, Semiconductors, RGB color model, Manufacturing, Ultraviolet radiation

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156
KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

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