High power diode lasers are widely used as the pump sources for fiber lasers and solid-state lasers, or the light sources for direct diode laser systems. To meet the emerging needs of fiber lasers, solid state lasers and direct diode laser systems, diode lasers are moving towards higher volume manufacturing, along with higher performance and lower cost. In this paper, we will present our progresses in these areas. We have set up a 6" GaAs wafer production line for high power diode laser chips, which includes MOCVD epitaxy and wafer fabrication. With the 6" wafer production line, we are producing multi-million chips per month for fiber laser pumping. The 6" wafers show great uniformity and reproducibility. Device performance is outstanding, with near 70% efficiency and high CW roll-over power.
High power density VCSELs are attracting attentions in the field of LiDAR applications. Multi-junction VCSEL is the key technology to obtain high power density. High slope efficiency, high filling factor and small divergence angle are the straight-forward research directions to realize this high performance multi-junction VCSEL array. We optimize the epitaxial design and fabrication process, such as tunnel junction, oxidation layer and array layout. The progress on high performance multi-junction VCSEL array emitting around 940 nm is reported. Selectively oxidized, top-emitting VCSEL emitter array with 59.7% power conversion efficiency and slope efficiency of 8.3 W/A are developed as the basic laser source targeting at the LiDAR applications. The fabricated VCSEL array devices with emitting area of 234*250 um2 exhibit power density higher than 1800 W/mm2 and divergence angle lower than 21 degree (1/e2) with 15A peak current, 10kHz 10 nano-second pulsed (FWHM) driver.
Vertical cavity surface emitting laser (VCSEL) have recently emerged as highly promising electro optic device in 3D sensing and Lidar due to excellent properties such as high reliability, attractive high power performance, design flexibility and low manufacturing costs. To become a dominant player in serving the consumer electronics and driverless cars markets, we develop 6-inch VCSEL production line include device design, epitaxial growth and device-fabrication. By optimizing the device structure and manufacturing process, high power and high efficiency VCSEL devices are developed. We demonstrate that the maximum power conversion efficiency of the triple active regions VCSEL with 61.6%. In this paper, we will present you the evolution of VCSEL manufacturing technology and device characterization.
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