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Haicheng Cao
at King Abdullah Univ of Science and Technology
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Publications (1)
Proceedings Article | 3 October 2024 Poster
UV-assisted nanoimprint lithography: the impact of loading effect in silicon on nanoscale pattern of metalens
Zahrah Alankhli, Xiaohang Li, Zhiyuan Lin, Feras AlQatari, Haicheng Cao
Proceedings Volume PC13111, PC131111W (2024) https://doi.org/10.1117/12.3029471
KEYWORDS: Silicon, Deep reactive ion etching, Nanoimprint lithography, Electron beam lithography, Lithography, Etching, Photoresist materials, Fabrication, Semiconductors, Reactive ion etching
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