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Dr. Haizhou Yin
at Globalfoundries Inc
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Publications (3)
Proceedings Article | 28 April 2023 Paper
Design-aware virtual metrology and process recipe recommendation
Proceedings Volume 12495, 124951V (2023) https://doi.org/10.1117/12.2661150
KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Modeling, Machine learning, Fabrication, Data processing, Semiconductors, Process modeling, Deposition processes
Proceedings Article | 23 March 2020 Presentation + Paper
Foundry approach for layout risk assessment through comprehensive pattern harvesting and large-scale data analysis
Monisa Ramesh Babu, Shenghua Song, Qian Xie, Pouya Rezaeifakhr, Eric Chiu, Joo Hyun Park, Deborah Ryan, Kiruthika Murali, Praneetha Poluju, Shobhit Malik, Haizhou Yin, Sriram Madhavan, Panneerselvam Venkatachalam
Proceedings Volume 11328, 113280H (2020) https://doi.org/10.1117/12.2551939
KEYWORDS: Inspection, Silicon, Machine learning, Databases, Scanning electron microscopy, Data modeling, Manufacturing, Data analysis, Analytics, Semiconducting wafers
Proceedings Article | 16 October 2017 Paper
Aerial image ORC checks and their correlation to wafer-edge yield limitation for metals: a study and an OPC resolution
Tamer Desouky, Yixiao Zhang, Mark Terry, Haizhou Yin, Muhammed Pallachali, Nicolai Petrov, Teck Jung Tang, Fadi Batarseh, Ahmed Khalil, Pietro Babighian, Rohan Deshpande, Deborah Ryan, Rao Desineni, Shweta Shokale, Feng Wang, Sang-Kee Eah, Jiechang Hou
Proceedings Volume 10451, 104511L (2017) https://doi.org/10.1117/12.2280568
KEYWORDS: Optical proximity correction, Semiconducting wafers, Silicon, Metals, Design for manufacturing, Scanning electron microscopy, Lithography
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