Ms. Hannah Narcross Profile

Hannah Narcross

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Publications (3)

Proceedings Article | 20 March 2015 Paper

Base developable negative tone molecular resist based on epoxide cross-linking

Brandon Sharp, Richard Lawson, Ashten Fralick, Hannah Narcross, Jun Sung Chun, Mark Neisser, Laren Tolbert, Clifford Henderson

Proceedings Volume 9425, 94251S (2015) https://doi.org/10.1117/12.2086039

KEYWORDS: Glasses, Standards development, Polymers, Polymerization, Molecules, Scanning electron microscopy, Photoresist developing, Semiconducting wafers, Silicon, Line edge roughness

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Proceedings Article | 20 March 2015 Paper

Effect of molecular resist structure on glass transition temperature and lithographic performance in epoxide functionalized negative tone resists

Hannah Narcross, Richard Lawson, Brandon Sharp, Jun Sung Chun, Mark Neisser, Laren Tolbert, Clifford Henderson

Proceedings Volume 9425, 94250C (2015) https://doi.org/10.1117/12.2086027

KEYWORDS: Glasses, Lithography, Polymerization, Polymers, Extreme ultraviolet lithography, Diffusion, Scanning electron microscopy, Extreme ultraviolet, Optical lithography, Light sources

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Proceedings Article | 20 March 2015 Paper

Optimizing performance in cross-linking negative-tone molecular resists

Richard Lawson, Hannah Narcross, Brandon Sharp, Jun Sung Chun, Mark Neisser, Laren Tolbert, Clifford Henderson

Proceedings Volume 9425, 94250A (2015) https://doi.org/10.1117/12.2086007

KEYWORDS: Silicon, Molecules, Optical lithography, Extreme ultraviolet, Standards development, Oxides, Glasses, Polymerization, Switches, Polymers

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