Dr. Hans Joachim Büchner Profile

Dr. Hans Joachim Büchner

at Technische Univ Ilmenau

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Author

Publications (10)

Proceedings Article | 18 May 2009 Paper

Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle

I. Rahneberg, H.-J. Büchner, G. Jäger

Proceedings Volume 7356, 73560S (2009) https://doi.org/10.1117/12.820634

KEYWORDS: Sensors, Head, Reflectors, Interferometers, Prisms, Distance measurement, Calibration, Beam splitters, Mirrors, Diodes

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Proceedings Article | 25 October 2006 Paper

Nanomeasuring and nanopositioning engineering

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann

Proceedings Volume 6280, 628001 (2006) https://doi.org/10.1117/12.715237

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Sensor technology, Nanoprobes, Microscopes, Spatial resolution, Optical testing

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Proceedings Article | 24 March 2006 Paper

Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology

Gerd Jäger, Tino Hausotte, Hans-Joachim Büchner, Eberhard Manske, Ingomar Schmidt, Rostyslav Mastylo

Proceedings Volume 6152, 615224 (2006) https://doi.org/10.1117/12.655156

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Optical testing, Sensor technology, Microscopes, Spatial resolution, Nanotechnology

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Proceedings Article | 14 February 2005 Paper

Integration of probe systems in a nanopositioning and nanomeasuring machine

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Hans-Joachim Buechner, Rainer Gruenwald, Roland Fussl

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611848

KEYWORDS: Sensors, Mirrors, Interferometers, System integration, Sensor technology, Calibration, Scanning probe microscopy, Photomasks, Wafer inspection, Metrology

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Proceedings Article | 20 December 2004 Paper

Design and investigation of an optical standing-wave interferometer for displacement measurements

Hans-Joachim Buechner, Viktor Mandryka, Gerd Jaeger

Proceedings Volume 5594, (2004) https://doi.org/10.1117/12.570214

KEYWORDS: Photodiodes, Mirrors, Interferometers, Sensors, Transparent conductors, Signal detection, Wave propagation interference, Phase shifts, Wave propagation, Optics manufacturing

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Proceedings Article | 10 September 2004 Paper

Design aspects in the development of a standing wave interferometer

Viktor Mandryka, Hans Buchner, Gerd Jager

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.546708

KEYWORDS: Sensors, Mirrors, Photodiodes, Interferometers, Reflectivity, Phase shifts, Reflection, Photodetectors, Coating, Transparent conductors

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Proceedings Article | 20 November 2003 Paper

Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, Denys Dontsov

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.507906

KEYWORDS: Interferometers, Retroreflectors, Sensors, Microscopes, Metrology, Microtechnology, Nanotechnology, Interferometry, Fiber optics, Waveguides

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Proceedings Article | 30 May 2003 Paper

Standing-wave interferometer based on partially transparent photodiodes

Hans Buchner, Eerke Bunte, Viktor Mandryka, Helmut Stiebig, Gerd Jaeger

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.499902

KEYWORDS: Photodiodes, Transparent conductors, Mirrors, Interferometers, Photodetectors, Reflection, Coating, Wave propagation interference, Glasses, Optical instrument design

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Proceedings Article | 29 July 2002 Paper

Nanopositioning and measuring technique

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Hans-Joachim Buechner, Rainer Gruenwald

Proceedings Volume 4900, (2002) https://doi.org/10.1117/12.484563

KEYWORDS: Mirrors, Microscopes, Sensors, Interferometers, Zerodur, Nanotechnology, Metrology, Laser systems engineering, Sensor technology, Manufacturing

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Proceedings Article | 11 September 2001 Paper

Traceable measurement results from scanning probe microscopes by laser interferometry

K. Hasche, Konrad Herrmann, R. Seemann, Hans-Joachim Buechner

Proceedings Volume 4420, (2001) https://doi.org/10.1117/12.439210

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Showing 5 of 10 publications

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