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Liquid Crystal Elastomers (LCEs) are promising candidates for soft-matter-based actuators for MEMS devices. They are loosely crosslinked polymer networks that show high strain rates. The ordering of embedded liquid crystals defines their actuation profile, and these actuators can demonstrate complex actuating mechanisms such as radial contraction and helical bending. However, their applications are limited in MEMS technology because of limited fabrication processes compatible with the actuator's fabrication.
We present a new method to structure the LCE actuators with spatially structured light compatible with MEMS fabrication processes. Fabrication of 50-100 μm thick actuators is done with the standard glass-cell filling process via capillary forces. As material polymerization is light-initiated, material structuring is achieved by selective polymerization with UV light. Then, after developing the material, the polymerized LCE is bonded to a secondary substrate via a stamp-and-stick technique.
A digital micromirror based (DMD) based projection setup was built to project the computer-generated arbitrary patterns on the substrate. This setup allows spatial structuring of the light, thereby enabling the pixel-by-pixel selective polymerization of the LCE actuators. This so-called maskless photolithography of the material enables the patterning of LCE actuators without any printed mask, hence improving the fabrication of the LCE-based MEMS devices. This process ow is automated to easily scale up the fabrication process to the 100mm wafer level.
We present coregistered images of tissue vasculature that allow a direct comparison between the performance of narrow-band imaging (NBI) and optical coherence tomography angiography (OCTA). Images were generated with a bimodal endomicroscope having a size of 15 × 2.4 × 3.3 mm3 (
We present the opto-mechanical design of a novel endomicroscope combining wide-field microscopy and 3D OCT, and demonstrate the advantages of 3D glass micro structuring based assembly and packaging in terms of optical performance and device miniaturization. Using ray-tracing based Monte Carlo simulations, we demonstrate that this precision leads to a significantly better optical performance compared to that offered by rival 3D machining techniques, such as the state-of-the-art 3D polymer printers and conventional micromachining based solutions.
We present here a highly-miniaturized continuously tunable optical bandpass filter in the MIR range for chemical detection in microreactors. Similar to a Fabry-Perot interferometer, the micro filter consists of two parallel multi-thin-film Bragg mirrors and an air gap, spaced by Liquid Crystal Elastomers (LCEs). The LCE is a novel actuator material composed of crosslinked polymer chains exhibiting strong macroscopic contraction as temperature is raised. We will show that the LCE can provide an extremely precise yet large mechanical movement of the two parallel mirrors leading to large freedom in the wavelength tuning range. Design, fabrication and measurements will be shown, demonstrating the functionality of the filter.
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