Mr. Harish Kumar Bolla Profile

Harish Kumar Bolla

at Advanced Micro Devices

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Publications (1)

Proceedings Article | 12 May 2005 Paper

Characterization, modeling, and impact of scattered light in low-k1 lithography

Bruno La Fontaine, Yunfei Deng, Mircea Dusa, Alden Acheta, Anita Fumar-Pici, Harish Bolla, Beverly Cheung, Bhanwar Singh, Harry Levinson

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.601188

KEYWORDS: Modulation transfer functions, Scanners, Light scattering, Lithography, Spatial frequencies, Scatterometry, Critical dimension metrology, Computer simulations, Semiconducting wafers, Optical microscopes

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