Polycrystalline diamond grown via chemical vapor deposition is a widely used optical material due to its extremely broad transmission window that extends from the visible through the far infrared. Random and periodic anti-reflective (AR) surface structures etched directly into the substrate provide an all-diamond solution for transmission enhancement without sacrificing the material’s unparalleled thermal conductivity. While periodic AR micro-structures (ARMs) can be lithographically fabricated with AR bandwidths exceeding 20 microns, their implementation at scale is hindered by the numerous manufacturing steps required. More recently, a single-step plasma-based process was developed for etching Randomly distributed Anti-Reflective nano-structures (RAR) into mono- and polycrystalline diamonds, with high transmission at wavelengths ranging from visible to longwave infrared (LWIR). With both approaches, the lack of dissimilar material unlocks the material’s full potential in various applications in the LWIR, such as IR spectroscopy and high-power lasers for extreme ultraviolet (EUV) generation. This work presents optical measurements of two-surface RAR nano-structures and single-surface periodic ARMs etched into polycrystalline diamond windows. The tradeoffs and advantages of each texture design will be discussed. Data for single-part, intra-batch, and inter-batch uniformity will highlight the scalability of RAR nano-textured diamond to commercial production levels.
The pulsed laser induced damage threshold (LiDT) of Random Anti-Reflective (RAR) nano-textured fused silica optics has been shown to be many times higher than thin-film AR coated optics at wavelengths ranging from the near UV through the NIR. Because an RAR nano-texture is formed by a plasma etch process that removes part of the optic surface, the observed increase in damage resistance has kept track with the LiDT advances attained by low roughness super-polishing and damage pre-cursor mitigation techniques. In this work, nano-second pulse LiDT testing of RAR nano-textured optics was conducted at the deep UV wavelength of 266nm. The effect on 266nm LiDT of the uniform removal of additional surface material from fused silica optics using a dry plasma etch process was investigated. This plasma-polishing (PP), pre-RAR process was varied using fluorine-based chemistries that removed 100-300nm of material from each test surface, with surface roughness then characterized using white-light interferometry. Photothermal interferometry confirmed that no surface absorption was added by the PP, RAR, and PP-RAR plasma etching. Both standard grade, and ultra-low bulk absorption (low-OH) fused silica were included in the tests. RAR nanotextured surfaces showed an average damage threshold of 8.4 J/cm2, a level 3 times higher than a commercially available thin-film AR coated surface. Unexpected from pulsed LiDT testing at many longer wavelengths, all plasma etched surfaces exhibited less than half the damage threshold of the untreated, as-polished fused silica surfaces, and there was no observed correlation with surface roughness or plasma etch depth. From work by others it was theorized that exposure to the deep UV photons generated by the plasma might induce absorptive electronic defects in the fused silica material that could explain the reduced damage resistance relative to non-exposed surfaces. As an initial test of this concept an RAR nano-textured sample was baked at 400C to remove the suspected electronic defect. The subsequent pulsed LiDT of this one annealed sample was found to be 15.5 J/cm2, nearly double that of all other plasma etched samples. Further work to confirm this result is on-going.
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