Prof. Hector Baez Medina Profile

Prof. Hector Baez Medina

at Univ de São Paulo

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Proceedings Article | 15 March 2011 Paper

Integration of a micro-incandescent lamp and an interferometric filter for optical applications

H. Baez, M. Alayo

Proceedings Volume 7940, 79401I (2011) https://doi.org/10.1117/12.875183

KEYWORDS: Optical filters, Interferometry, Silicon, Transmittance, Lamps, Integrated optics, Chromium, Silica, Microelectronics, Plasma enhanced chemical vapor deposition

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In this work we propose an integration of two kinds of optical devices: an incandescent micro lamp and an interferometric filter, both fabricated on silicon technology. The micro lamp is based on a chromium micro resistor, working as a lamp filament, embedded between two oxynitride films and self-sustained through the partial silicon substrate etching using KOH solutions. The interferometric filters were fabricated through the deposition of periodically alternated PECVD Si₃N₄ and SiO₂ films whose thicknesses were previously defined by numerical simulations. We present the fabrication of these two devices separately and its integration in a hybrid way. The results demonstrated that light filtering can be obtained on micro-lamps light emission spectrums when integrated with interferometric filters, at the wavelength intervals defined by filter transmittance spectrums. Electrical characterization allowed determining the necessary current to obtain constant and stable light emission from micro lamps. The possibility of integration in a unique process, in a quasi-monolithic integration, is proposed.

Proceedings Article | 22 January 2007 Paper

Electro-opto-mechanical cantilever-based logic gates

G. Rehder, M. Alayo, H. Medina, M. Carreño

Proceedings Volume 6466, 64660C (2007) https://doi.org/10.1117/12.699341

KEYWORDS: Waveguides, Silicon, Switches, Logic devices, Optical switching, Signal processing, Integrated optics, Cladding, Chromium, Logic

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In this work we describe the fabrication and characterization of micro-opto-electro-mechanical AND, OR and XOR logic gates based in a combination of optical and micro-electro-mechanical devices. These structures consist of silicon oxynitride-based optical waveguides, through which a light beam of 633-nm can be conducted, and mobile thermo-electro actuated cantilevers, which form part of the waveguide and can work as ON-OFF switches for the laser. These switches are combined to form AND, OR and XOR gates, allowing the laser light to pass or blocking the laser light when activated electrically. The cantilevers are fabricated by freeing regions of the waveguide, which is done by front side micromachining the silicon wafer used as substrate. Also, they are actuated electrically through the heating of a metallic resistance positioned in the device, where the applied current heats the cantilevers and, due to the difference in thermal expansion coefficients of the constituent materials, it is possible to produce a controlled motion proportional to the heating current. Therefore, the switches can be electrically polarized in on/off cycles allowing or blocking the light through the waveguide, similar to logic "1's" and "0's". These switches are adequately arranged to produce an output that is similar to the conventional digital logic gates through electric control (input) of cantilever-based ON-OFF switches.

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