Dr. Hendrik Specht Profile

Dr. Hendrik Specht

at Bosch Sensortec GmbH

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Publications (3)

Proceedings Article | 9 May 2012 Paper

Fabry-Perot tunable infrared filter based on structured reflectors

Steffen Kurth, Karla Hiller, Norbert Neumann, Mario Seifert, Martin Ebermann, Hendrik Specht, Marco Meinig, Thomas Gessner

Proceedings Volume 8428, 84281O (2012) https://doi.org/10.1117/12.922603

KEYWORDS: Transmittance, Reflectors, Resonators, Reflectivity, Silicon, Aluminum, Wafer bonding, Fabry–Perot interferometers, Metals, Optical filtering

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Proceedings Article | 9 February 2009 Paper

Analysis of image quality for laser display scanner test

H. Specht, S. Kurth, D. Billep, T. Gessner

Proceedings Volume 7206, 72060G (2009) https://doi.org/10.1117/12.808674

KEYWORDS: Image quality, Mirrors, Laser based displays, Distortion, Micromirrors, Laser scanners, Image processing, Cameras, 3D scanning, Projection systems

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Proceedings Article | 9 February 2009 Paper

Novel test structures for characterization of microsystems parameters at wafer level

Alexey Shaporin, Petra Streit, Hendrik Specht, Jan Mehner, Wolfram Dötzel

Proceedings Volume 7206, 72060E (2009) https://doi.org/10.1117/12.810051

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Microsystems, Silicon, Manufacturing, Doppler effect, Finite element methods, Data modeling, Genetic algorithms, Deep reactive ion etching

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