PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes, however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates.
In this study, we manufactured a 400 mm long deformable mirror which has 30 channels on plane mirror surfaces. We evaluated the PZT response by applying voltage to each electrode.
PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard x-ray regimes[1], however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates[2]. In this study, we achieved a 2 nm figure error on an elliptical shape of a glue-free deformable mirror. We evaluated the figure change characteristics due to humidity and temperature increasing at the ultrafine figure error condition.
PZT-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they haven’t been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore we have developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. However at long type, precise shape control had been hard since its mirror size was longer than PZT plate length whose gap between each PZT enevitablly existed. These gap area cannot be bended.
In this study, we developed deformable mirror using triangle shaped PZT which aim is to reduce gap effect even at long mirror. At the simulation result, the gap effect would be reduced to be under 0.01 nm even at maximum bending.
Also, vacuum tests of PZT glue-free bimolph mirror were also conducted. The final degree of vacuum obtained 9×10-8 Pa that was same as background level.
We fabricate ultra-precision mirrors, Osaka Mirror, for synchrotron facilities. In order to fabricate them, it is very important to measure mirror surface precisely. In respect of the importance, we use two kinds of metrology, RADSI and MSI, developed by Osaka University. We have delivered more than 300 mirrors to synchrotron facilities all over the world since 2006 and our mirrors have produced excellent results to many researchers.
As the demand on one meter long mirrors has increased lately, we developed RADSI and MSI systems which are capable in precise measurement of such long mirrors.
Advanced Kirkpatrick-Baez mirror optics using two monolithic imaging mirrors was developed to realize an achromatic, high-resolution, and a high-stability full-field X-ray microscope. The mirror consists of an elliptical section and a hyperbolic section on a quartz glass substrate, in which the geometry follows the Wolter (type I) optics rules. A preliminary test was performed at SPring-8 using X-rays monochromatized to 9.881 keV. A 100-nm feature on a Siemens star chart could be clearly observed.
A surface profiler system with a high accuracy of the order of nanometers has been developed for a half-meter-long X-ray
mirror. This system is based on microstitching interferometer (MSI) and relative angle determinable stitching
interferometer (RADSI). Using elastic hinges and linear actuators, we designed the 5-axis- and 6-axis stages for the MSI
and RADSI, respectively, for the half-meter-long X-ray mirror. A test mirror of length 0.5 m was used to measure the
height accuracy (1.4 nm in rms) and lateral resolution (36 μm) of the proposed system.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.