CONFERENCE PROCEEDINGS
Advanced Search
Prof. Hong Chen
at Institute of Physics
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 13 November 2014 Paper
Fabrication of 2-inch nano patterned sapphire substrate with high uniformity by two-beam laser interference lithography
LongGui Dai, Fan Yang, Gen Yue, Yang Jiang, Haiqiang Jia, Wenxin Wang, Hong Chen
Proceedings Volume 9277, 927715 (2014) https://doi.org/10.1117/12.2072991
KEYWORDS: Sapphire, Nanolithography, Mirrors, Patterned sapphire substrate, Photoresist materials, Nanostructures, Scanning electron microscopy, Lithography, Light emitting diodes, Dry etching
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top