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Hongwei Huang
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Publications (1)
Proceedings Article | 10 December 2024 Paper
TransUNet-based end-to-end proximity effect correction for electron beam lithography
Hongwei Huang, Haolan Wang, Yuyang Liu, Sikun Li
Proceedings Volume 13423, 1342317 (2024) https://doi.org/10.1117/12.3053060
KEYWORDS: Education and training, Machine learning, Electron beam lithography, Point spread functions, Monte Carlo methods, Data processing, Data modeling, Optical proximity correction, Scattering
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