Mr. Chung Yang Huang Profile

Chung Yang Huang

Manager at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 21 November 2023 Presentation + Paper

New EUV mask blank for N3 technology node and beyond

S. Yang, W. Chen, C. Huang, Chien-Min Lee, Joy Huang, Shy-Jay Lin, C. Chen, Yoshiaki Ikuta, Tomohiko Satoh, Yosuke Nakakita

Proceedings Volume 12751, 127510G (2023) https://doi.org/10.1117/12.2688179

KEYWORDS: Etching, Ruthenium, Extreme ultraviolet, Semiconducting wafers, 3D mask effects, Photoresist processing, Reflection, Optical proximity correction

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Proceedings Article | 24 March 2006 Paper

Application of optical CD metrology based on both spectroscopic ellipsometry and scatterometry for Si-recess monitor

Peter Huang, Ryan Chen, Fang-Cheng Chen, Baw-Ching Perng, Jyu-Horng Shieh, S. Jang, M. Liang

Proceedings Volume 6152, 61520H (2006) https://doi.org/10.1117/12.656226

KEYWORDS: Scatterometry, Silicon, Transmission electron microscopy, Critical dimension metrology, Metrology, Inspection, Scatter measurement, Spectroscopic ellipsometry, Process control, Data modeling

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