Ms. Huijun Wang Profile

Huijun Wang

at Beijing Institute of Space Mechanics & Electricity

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Proceedings Article | 5 November 2020 Paper

Simulation and polishing experiment of aspheric mirror with pre-filled surface figure

Huijun Wang, Jiyou Zhang, Yuming Zhou, Wen Guo, Ang Li

Proceedings Volume 11568, 1156810 (2020) https://doi.org/10.1117/12.2579655

KEYWORDS: Surface finishing, Polishing, Mirrors, Aspheric optics, Interferometers, Aspheric lenses, Zernike polynomials, Reflectivity, Metrology

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Smart robot polishing experiments of a reflective mirror are carried on in the paper to verify the pre-filling method. First, pre-filling method is used to simulate the surface figure of a zerodur mirror whose edge is out of the measuring scope of the Zygo interferometer partly in contrast to that of the original one. Second, the polished surface figures with different polishing depths are simulated in the paper to get the relatively right polishing depth of the mirror whose surface figure is processed with the pre-filling method. And at the same time, the polished surface figures with different polishing depths with the unfilled surface figure are also simulated by contrast. Third, smart robot polishing experiment is carried on to verify both the chosen polishing depth and the pre-filling method. Forth, the real surface figure of the mirror after polishing is calibrated. The measuring results show that the surface figure of the mirror after polishing is changed greatly in comparison of that of the mirror before polishing: the surface figure of the mirror before polishing is that the root-meansquare value (RMS value) is about0.374 λ (λ=632.8nm), and the edge is invisible partly, while the RMS value of the surface figure of the mirror after polishing is about0.231 λ, and the edge is visible. The convergence rate of RMS value is 38.2%. The experimental results show that pre-filling method can simulate rightly the surface figure of the aspheric mirror whose edge is out of the measuring scope of the Zygo interferometer.

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